Illumination optical apparatus, exposure apparatus, and device manufacturing method
First Claim
1. An illumination optical apparatus for illuminating a pattern arranged on an irradiated plane with a plurality of pulses of light, the illumination optical apparatus comprising:
- an optical device arranged upstream from the irradiated plane and including a plurality of optical elements, each of which spatially modulates the pulses of light in accordance with incident positions of the pulses of light; and
an illumination control system which controls the plurality of optical elements, whenever at least one pulse of light is emitted, in a manner such that the optical elements spatially modulate the plurality of pulses of light differently from one another; and
a relay optical system arranged downstream from the optical device and changing distribution of angles of incident light to distribution of positions of exit light, wherein the relay optical system guides the plurality of pulses of light spatially modulated by the optical elements to a predetermined plane, which is an illumination pupil plane of the illumination optical system or a plane optically conjugated with the illumination pupil plane.
1 Assignment
0 Petitions
Accused Products
Abstract
An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.
41 Citations
20 Claims
-
1. An illumination optical apparatus for illuminating a pattern arranged on an irradiated plane with a plurality of pulses of light, the illumination optical apparatus comprising:
-
an optical device arranged upstream from the irradiated plane and including a plurality of optical elements, each of which spatially modulates the pulses of light in accordance with incident positions of the pulses of light; and an illumination control system which controls the plurality of optical elements, whenever at least one pulse of light is emitted, in a manner such that the optical elements spatially modulate the plurality of pulses of light differently from one another; and a relay optical system arranged downstream from the optical device and changing distribution of angles of incident light to distribution of positions of exit light, wherein the relay optical system guides the plurality of pulses of light spatially modulated by the optical elements to a predetermined plane, which is an illumination pupil plane of the illumination optical system or a plane optically conjugated with the illumination pupil plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A method for exposing an image of a pattern arranged on a first plane onto an object arranged on a second plane with a plurality of pulses of light, the method comprising:
-
spatially modulating pulses of light in accordance with incident positions of the pulses of light, wherein the spatially modulating includes spatially modulating the plurality of pulses of light differently from one another by a plurality of optical elements whenever at least one pulse of light is emitted; guiding the pulses of light that have been spatially modulated through an optical system, which converts distribution of angles of incident light to distribution of positions of exit light, to a predetermined plane to form a given intensity distribution of light on the predetermined plane; guiding the pulses of light that have traveled via the predetermined plane, to the first plane; and using a projection optical system to form an image of the pattern arranged on the first plane onto the second plane, wherein the predetermined plane is a plane conjugated with an aperture stop of the projection optical system. - View Dependent Claims (20)
-
Specification