Proof-mass with supporting structure on integrated circuit-MEMS platform and method of fabricating the same
First Claim
1. A micro-electromechanical-system (MEMS) device, comprising:
- a substrate;
at least one semiconductor layer provided on the substrate;
a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer;
a support structure attached to the substrate;
at least one elastic device attached to the support structure;
a proof-mass suspended by the at least one elastic device and free to move in all of the x-, y-, and z-directions;
at least one top electrode provided on the at least one elastic device; and
at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes;
wherein;
the MEMS device is configured to produce an electrostatic potential between the at least one top electrode and the at least one bottom electrode that applies a force to the suspended proof-mass in at least one of the x-, y-, and z-directions; and
the drive/sense circuitry, proof-mass, support structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.
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Abstract
Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.
28 Citations
21 Claims
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1. A micro-electromechanical-system (MEMS) device, comprising:
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a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in all of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes; wherein; the MEMS device is configured to produce an electrostatic potential between the at least one top electrode and the at least one bottom electrode that applies a force to the suspended proof-mass in at least one of the x-, y-, and z-directions; and the drive/sense circuitry, proof-mass, support structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A micro-electromechanical-system (MEMS) device, comprising:
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a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in all of the x-, y-, and z-directions; at least one conductive layer provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes; wherein; the MEMS device is configured to produce an electrostatic potential between the at least one conductive layer and the at least one bottom electrode that applies a force to the suspended proof-mass in at least one of the x-, y-, and z-directions; and the drive/sense circuitry, proof-mass, support structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer. - View Dependent Claims (19, 20, 21)
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Specification