Capacitive sensor with stress relief that compensates for package stress
First Claim
1. A device comprising:
- a microelectromechanical systems (MEMS) sensor, said sensor comprising;
a movable element adapted for motion relative to a rotational axis offset between first and second ends thereof to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section exhibiting a first length between said rotational axis and said first end that is greater than a second length between said rotational axis and said second end, said first section including slots extending through said movable element; and
a static conductive layer spaced away from said moveable element, said static conductive layer including a first electrode element and a second electrode element, said first electrode element facing said first section and said second electrode element facing said second section of said movable element.
29 Assignments
0 Petitions
Accused Products
Abstract
A microelectromechanical systems (MEMS) capacitive sensor (52) includes a movable element (56) pivotable about a rotational axis (68) offset between ends (80, 84) thereof. A static conductive layer (58) is spaced away from the movable element (56) and includes electrode elements (62, 64). The movable element (56) includes a section (74) between the rotational axis (68) and one end (80) that exhibits a length (78). The movable element (56) further includes a section (76) between the rotational axis (68) and the other end (84) that exhibits a length (82) that is less than the length (78) of the section (74). The section (74) includes slots (88) extending through movable element (56) from the end (80) toward the rotational axis (68). The slots (88) provide stress relief in section (74) that compensates for package stress to improve sensor performance.
-
Citations
20 Claims
-
1. A device comprising:
a microelectromechanical systems (MEMS) sensor, said sensor comprising; a movable element adapted for motion relative to a rotational axis offset between first and second ends thereof to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section exhibiting a first length between said rotational axis and said first end that is greater than a second length between said rotational axis and said second end, said first section including slots extending through said movable element; and a static conductive layer spaced away from said moveable element, said static conductive layer including a first electrode element and a second electrode element, said first electrode element facing said first section and said second electrode element facing said second section of said movable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
11. A method of fabricating a microelectromechanical systems (MEMS) sensor comprising:
-
providing a substrate; forming a static conductive layer on said substrate to include a first electrode element and a second electrode element; forming a sacrificial layer on said static conductive layer; forming a movable element on said sacrificial layer adapted for motion relative to a rotational axis offset between first and second ends thereof to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section exhibiting a first length between said rotational axis and said first end that is greater than a second length between said rotational axis and said second end, wherein forming said movable element includes forming slots in said first section extending through said movable element; and selectively removing said sacrificial layer such that said conductive layer is spaced away from said movable element, said conductive layer being formed such that said first electrode element faces said first section and said second electrode element faces said second section of said movable element. - View Dependent Claims (12, 13, 14, 15, 16)
-
-
17. A microelectromechanical systems (MEMS) sensor comprising:
-
a substrate; a movable element adapted for motion relative to a rotational axis offset between first and second ends thereof to form a first section between said rotational axis and said first end and a second section between said rotational axis and said second end, said first section exhibiting a first length between said rotational axis and said first end that is greater than a second length between said rotational axis and said second end, said first section including slots extending through said movable element, each of said slots extending from said first end of said first section toward said rotational axis; at least one suspension anchor formed on a surface of said substrate, said at least one suspension anchor pivotally coupling said movable element to said substrate at said rotational axis; and a static conductive layer spaced away from said moveable element, said static conductive layer including a first electrode element and a second electrode element, said first electrode element facing said first section and said second electrode element facing said second section of said movable element. - View Dependent Claims (18, 19, 20)
-
Specification