Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
First Claim
1. A microfluidic device for nucleic acid analysis comprising:
- a) a monolithic semiconductor body and a structure arranged on said monolithic semiconductor body;
b) a micro fluidic circuit at least partially accommodated in said monolithic semiconductor body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body;
c) a micropump, including a plurality of sealed chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit,wherein said sealed chambers include at least one superficial sealed chamber formed in and delimited by said structure, above said monolithic semiconductor body, and said sealed chambers include at least one buried chamber formed inside said body;
wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective chambers and said microfluidic circuit,wherein said openable sealing elements are integrated in said monolithic semiconductor body; and
wherein groups of alternating buried chambers and superficial sealed chambers are series connectable through connecting passages reversibly closed by respective openable sealing elements and wherein one superficial sealed chamber in each group is connectable to said microfluidic circuit.
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Accused Products
Abstract
A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13).
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Citations
21 Claims
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1. A microfluidic device for nucleic acid analysis comprising:
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a) a monolithic semiconductor body and a structure arranged on said monolithic semiconductor body; b) a micro fluidic circuit at least partially accommodated in said monolithic semiconductor body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body; c) a micropump, including a plurality of sealed chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit, wherein said sealed chambers include at least one superficial sealed chamber formed in and delimited by said structure, above said monolithic semiconductor body, and said sealed chambers include at least one buried chamber formed inside said body; wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective chambers and said microfluidic circuit, wherein said openable sealing elements are integrated in said monolithic semiconductor body; and wherein groups of alternating buried chambers and superficial sealed chambers are series connectable through connecting passages reversibly closed by respective openable sealing elements and wherein one superficial sealed chamber in each group is connectable to said microfluidic circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A process for manufacturing a micro fluidic device for nucleic acid analysis, comprising the steps of:
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a) forming a microfluidic circuit at least partially accommodated in a monolithic semiconductor body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body; and b) forming a micropump, having a plurality of sealed chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit, wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective sealed chambers and said microfluidic circuit; wherein said step of forming a micropump comprises i) forming a structure on said monolithic semiconductor body and at least one superficial sealed chamber in said structure, above said monolithic semiconductor body and integrating said openable sealing elements in said body; and
ii) forming at least one buried chamber inside said body;wherein groups of alternating buried chambers and superficial sealed chambers are series connectable through connecting passages reversibly closed by respective openable sealing elements and wherein one superficial sealed chamber in each group is connectable to said microfluidic circuit. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification