Electron microscope device

• US 8,097,849 B2
• Filed: 12/11/2009
• Issued: 01/17/2012
• Est. Priority Date: 12/26/2008
• Status: Expired due to Fees

• Current Assignee: Horiba Limited
• Original Assignee: Kabushiki Kaisha Topcon
• Inventors: Ohtomo, Fumio, Isozaki, Hisashi
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US12/653,324
• Publication Number:
  US 20100163728A1
• Time in Patent Office: 767 Days
• Field of Search: 250/310, 359/369
• US Class Current: 250/310
• CPC Class Codes: G02B 21/06 Means for illuminating specimens
• CPC Class Codes: G02B 21/365 Control or image processing arrangements for digital or video microscopes G02B21/361, G02B21/362 take precedence
• CPC Class Codes: H01J 2237/2482 Optical means
• CPC Class Codes: H01J 37/22 Optical or photographic arrangements associated with the tube using a CRT for the display of the image in a scanning electron microscope H01J37/28; observing the object or the point of impact on the object in tubes for the localised treatment of materials H01J37/3007
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.

Claims

1. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has scanning means for scanning an electron beam and an electron detector for detecting electrons issued from a specimen scanned by the electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, wherein said optical microscope projects an illumination light to the specimen, receives a reflection light from said specimen and acquires an optical image, and wherein an optical axis of said scanning electron microscope crosses an optical axis of said optical microscope at a point of observation of said specimen,

wherein said scanning means projects said electron beam for scanning with a scanning width wider than a width of a scanning area, said optical microscope projects an illumination light and acquires an optical image in an overrunning portion where said electron beam is projected beyond said scanning area, and said scanning electron microscope acquires a scanning electron image based on electrons issued when said electron beam scans over said scanning area.

2. The electron microscope device according to claim 1, wherein said scanning electron microscope sets said electron detector to an inactive status in said overrunning portion and also sets said electron detector to an active status when said electron beam is projected to scan over said scanning area, said optical microscope projects said illumination light in said overrunning portion of said electron beam and said illumination light is turned off when the electron beam is projected to scan over said scanning area.

3. The electron microscope device according to claim 1, wherein said optical microscope turns on said illumination light at the moment when the projection of the light to said overrunning portion is started, and turns off said illumination light before the projection of the light to said overrunning portion is finished.

4. The electron microscope device according to claim 3, wherein said turning-on operation of said illumination light and said overrunning portion are in such a relationship that discharge of said electron detector is completed before the projection of the light to said overrunning portion is finished after said electron detector receives said illumination light.

5. The electron microscope device according to claim 1, wherein said overrunning portion of the light can be changed in said scanning electron microscope.

6. The electron microscope device according to one of claims 1 to 3, wherein said overrunning portion of the light is made up with a scanning finishing portion of said electron beam and with a scanning starting portion subsequent to said scanning finishing portion.