Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing method
First Claim
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1. An exposure apparatus that exposes an object held by a movable body with an energy beam, the apparatus comprising:
- an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures positional information of the movable body using a plurality of heads of the head member that faces the measurement member;
a detection device that detects information on a surface state of the measurement member; and
a controller that controls a position of the movable body based on the measured positional information and also selects a plurality of heads to be used for the measurement based on a result of the detection.
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Abstract
By irradiating a detection beam from an irradiation system of a detection device to a scale used for measuring the position of a wafer stage, and detecting the detection beam via the scale by a photodetection system, a surface state (an existence state of foreign substance) of the scale is detected. With this operation, detection of the surface state can be performed contactlessly with respect to the scale. Moreover, movement control of the wafer stage can be performed with high precision by taking the surface state into consideration.
37 Citations
20 Claims
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1. An exposure apparatus that exposes an object held by a movable body with an energy beam, the apparatus comprising:
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an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures positional information of the movable body using a plurality of heads of the head member that faces the measurement member; a detection device that detects information on a surface state of the measurement member; and a controller that controls a position of the movable body based on the measured positional information and also selects a plurality of heads to be used for the measurement based on a result of the detection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An exposure method of exposing an object held by a movable body with an energy beam, the method comprising:
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a measurement process of measuring positional information of the movable body, using an encoder system of which one of a measurement member and a head member is arranged on the movable body and the other of the members is arranged facing the movable body, and which measures the positional information using a plurality of heads of the head member that faces the measurement member; a detection process of detecting information on a surface state of the measurement member using a detection device; and a control process of controlling a position of the movable body based on the measured positional information and also selecting a plurality of heads to be used for the measurement based on a result of the detection. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification