Analog interferometric modulator device with electrostatic actuation and release
First Claim
1. An electromechanical systems device comprising:
- a first electrode;
an electrically nonconductive layer over the first electrode;
a second electrode electrically insulated from the first electrode;
a third electrode electrically insulated from the first electrode and the second electrode;
a support structure that separates the first electrode from the second electrode, the third electrode including an electrically conductive portion of the support structure that separates the first electrode from the second electrode; and
a reflective element movable between a first position and a second position upon application of a voltage difference between the first electrode and the second electrode, the reflective element substantially parallel to and spaced from the electrically nonconductive layer when the reflective element is in the second position, the reflective element substantially parallel to and in contact with a portion of the electrically nonconductive layer when the reflective element is in the first position, wherein at least a portion of the third electrode is lower than the reflective element when the reflective element is in the second position, and wherein at least a portion of the third electrode is higher than the reflective element when the reflective element is in the first position,wherein an adhesive force is generated between the reflective element and the portion of the electrically nonconductive layer when the reflective element is in the first position, and wherein the device is configured such that voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.
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Accused Products
Abstract
A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.
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Citations
30 Claims
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1. An electromechanical systems device comprising:
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a first electrode; an electrically nonconductive layer over the first electrode; a second electrode electrically insulated from the first electrode; a third electrode electrically insulated from the first electrode and the second electrode; a support structure that separates the first electrode from the second electrode, the third electrode including an electrically conductive portion of the support structure that separates the first electrode from the second electrode; and a reflective element movable between a first position and a second position upon application of a voltage difference between the first electrode and the second electrode, the reflective element substantially parallel to and spaced from the electrically nonconductive layer when the reflective element is in the second position, the reflective element substantially parallel to and in contact with a portion of the electrically nonconductive layer when the reflective element is in the first position, wherein at least a portion of the third electrode is lower than the reflective element when the reflective element is in the second position, and wherein at least a portion of the third electrode is higher than the reflective element when the reflective element is in the first position, wherein an adhesive force is generated between the reflective element and the portion of the electrically nonconductive layer when the reflective element is in the first position, and wherein the device is configured such that voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An electromechanical systems device comprising:
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a first means for conducting electricity; means for electrically insulating, the insulating means over the first conducting means; a second means for conducting electricity, the second conducting means electrically insulated from the first conducting means; a third means for conducting electricity, the third conducting means electrically insulated from the first conducting means and the second conducting means; means for separating the first conducting means from the second conducting means, the third conducting means including an electrically conductive portion of the means for separating the first conducting means from the second conducting means; and means for reflecting light, the reflecting means movable between a first position and a second position upon application of a voltage difference between the first conducting means and the second conducting means, the reflecting means substantially parallel to and spaced from the insulating means when the reflecting means is in the second position, the reflecting means substantially parallel to and in contact with a portion of the insulating means when the reflecting means is in the first position, wherein at least a portion of the third conducting means is lower than the reflecting means when the reflecting means is in the second position, and wherein at least a portion of the third conducting means is higher than the reflecting means when the reflecting means is in the first position, wherein an adhesive force is generated between the reflecting means and the portion of the insulating means when the reflecting means is in the first position, and wherein the device is configured such that voltages applied to the first conducting means, the second conducting means, and the third conducting means at least partially reduce or counteract the adhesive force. - View Dependent Claims (27, 28, 29, 30)
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Specification