×

Electromechanical system having a dielectric movable membrane

  • US 8,098,417 B2
  • Filed: 02/11/2011
  • Issued: 01/17/2012
  • Est. Priority Date: 05/09/2007
  • Status: Active Grant
First Claim
Patent Images

1. An electromechanical device comprising:

  • a partially reflective and partially transmissive layer; and

    a movable functional element includinga patterned flexible dielectric layer configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer; and

    a reflective layer mechanically coupled to the flexible dielectric layer, the reflective layer situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×