Electromechanical system having a dielectric movable membrane

• US 8,098,417 B2
• Filed: 02/11/2011
• Issued: 01/17/2012
• Est. Priority Date: 05/09/2007
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Sasagawa, Teruo
• Primary Examiner(s): Pinkney, Dawayne
• Application Number:
  US13/025,859
• Publication Number:
  US 20110134505A1
• Time in Patent Office: 340 Days
• Field of Search: 359290-292, 359/245, 359222-225, 359/198, 359260-263, 359/298, 359301-303, 359317-318, 359/295
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.

Claims

1. An electromechanical device comprising:

a partially reflective and partially transmissive layer; and

a movable functional element including

a patterned flexible dielectric layer configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer; and

a reflective layer mechanically coupled to the flexible dielectric layer, the reflective layer situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.

2. The device of claim 1, wherein the flexible dielectric layer comprises SiON.

3. The device of claim 1, wherein the reflective layer is not spaced from the flexible dielectric layer.

4. The device of claim 1, wherein the partially reflective and partially transmissive layer comprises at least one of chromium and molybdenum-chromium.

5. The device of claim 1, further comprising a plurality of posts supporting the functional element, wherein a coefficient of thermal expansion of the flexible dielectric layer is substantially similar to a coefficient of thermal expansion of the posts.

6. The device of claim 5, wherein the flexible dielectric layer comprises a dielectric material and wherein the plurality of supports comprises the dielectric material.

7. The device of claim 1, wherein the flexible dielectric layer is patterned by etching portions of a dielectric layer.

8. The device of claim 1, wherein the movable functional element further comprises a conductive layer coupled to the flexible dielectric layer on a side opposite to the reflective layer.

9. The device of claim 8, wherein the reflective layer comprises a material and wherein the conductive layer comprises the material.

10. The device of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

11. The device of claim 10, further comprising a driver circuit configured to send at least one signal to the display.

12. The device of claim 11, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

13. The device of claim 10, further comprising an image source module configured to send said image data to said processor.

14. The device of claim 13, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

15. The device of claim 10, further comprising an input device configured to receive input data and to communicate said input data to said processor.

16. An electromechanical device comprising:

first means for reflecting; and

means for moving a portion of the device in a direction generally perpendicular to first means for reflecting in response to voltages applied to the first reflecting means, the moving means including

second means for reflecting; and

patterned dielectric means for supporting the second reflecting means, the supporting means mechanically coupled to the second reflecting means, the second reflecting means situated between the supporting means and the first reflecting means.

17. The device of claim 16, wherein the first reflecting means comprises a partially reflective and partially transmissive layer, or wherein the moving means comprises a movable functional element, or wherein the second reflecting means comprises a reflective layer, or wherein the supporting means comprises a flexible dielectric layer.

18. A method of manufacturing an electromechanical device, the method comprising:

forming a movable functional element, wherein forming the movable functional element includes

patterning a flexible dielectric layer, the flexible dielectric layer mechanically coupled to a reflective layer situated between the flexible dielectric layer and a partially reflective and partially transmissive layer, the patterned flexible dielectric layer configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer.