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MEMS sensor with cap electrode

  • US 8,100,012 B2
  • Filed: 01/11/2008
  • Issued: 01/24/2012
  • Est. Priority Date: 01/11/2007
  • Status: Active Grant
First Claim
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1. A MEMS sensor comprising:

  • a substrate having a MEMS structure movably attached to the substrate;

    a cap attached to the substrate, the cap encapsulating the MEMS structure;

    an electrode formed on the cap that senses movement of the MEMS structure;

    a reference electrode formed coplanar with the MEMS structure and non-movably attached to the substrate for increasing accuracy of movement measurements of the MEMS structure; and

    a second electrode formed on the substrate beneath the MEMS structure.

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