Substrate holding device, exposure apparatus, and device manufacturing method

• US 8,102,512 B2
• Filed: 09/16/2005
• Issued: 01/24/2012
• Est. Priority Date: 09/17/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibuta, Makoto, Takaiwa, Hiroaki, Yoshida, Yuichi
• Primary Examiner(s): Kim, Peter B
• Assistant Examiner(s): Riddle, Christina
• Application Number:
  US11/575,392
• Publication Number:
  US 20070269294A1
• Time in Patent Office: 2,321 Days
• Field of Search: 355/30, 355/52, 355/53, 355/55, 355 72- 74, 355/77, 250/492.1, 250/492.2, 250/492.22, 250/548, 430/311, 430/30, 430/5, 430/8, 430/22, 430/312, 430/322
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

To provide a substrate holding apparatus which can prevent a liquid from entering into a rear surface side of a substrate. A substrate holding apparatus (PH) is provided with a base material (PHB), a first holding portion (PH1) formed on the base material (PHB) for holding the substrate (P), and a second holding portion (PH2) formed on the base material (PHB) for holding a plate member (T) by surrounding the circumference of a processing substrate (P) held by the first holding portion (PH1). The second holding portion (PH2) holds the plate member (T) so as to form a second space (32) on the side of the rear surface (Tb) of the plate member (T). On the rear surface (Tb) of the plate member (T), an absorbing member (100) is arranged for absorbing the liquid (LQ) entered from a gap (A) between the substrate (P) held by the first holding portion (PH1) and the plate member (T) held by the second holding portion (PH2).

Claims

1. A substrate holding device comprising:

a base member,

a first holding portion that is formed on the base member and holds a substrate, and

a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein

the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and

a porous member positioned outside the first peripheral wall portion with the entire porous member being under a gap between the substrate held by the first holding portion and the plate member held by the second holding portion so that the porous member thereby holds a liquid having penetrated through the gap and used to liquid-immersion expose the substrate.

2. A substrate holding device according to claim 1, wherein the porous member is formed to be ring-shaped so as to surround the outside of the first peripheral wall portion.

3. A substrate holding device according to claim 1,

wherein the second holding portion has a second supporting portion, having a protruding shape, that supports the rear surface of the plate member and a second peripheral wall portion that is formed so as to face the rear surface of the plate member and surround the first peripheral wall portion

and wherein the porous member is provided between the first peripheral wall portion and the second peripheral wall portion.

4. A substrate holding device according to claim 1, further comprising a recovery mechanism that is in contact with the porous member and suck-and-recovers the liquid held by the porous member.

9. A substrate holding device according to claim 1, wherein the porous member is positioned directly under the gap so that the porous member thereby holds the liquid having penetrated through the gap and thereby traveled directly to the porous member.

5. A substrate holding device comprising:

a base member,

a first holding portion that is formed on the base member and holds a substrate, and

a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein

the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and

at least a portion of the first peripheral wall portion is formed by a porous body positioned below the substrate to thereby hold a liquid used to liquid-immersion expose the substrate and having penetrated through a gap between the substrate held by the first holding portion and the plate member held by the second holding portion, wherein the entire porous body is positioned below the gap.

6. A substrate holding device according to claim 5, provided with a recovery mechanism that suck-and-recovers the liquid on the surface of the porous body via the porous body.

7. A substrate holding device according to claim 5, provided with a gas supply mechanism that blows out a gas from the surface of the porous body via the porous body.

8. A substrate holding device according to claim 5, wherein the first peripheral wall portion has an upper surface that faces the rear surface of the substrate and wherein at least the upper surface is the porous body.

10. A substrate holding device comprising:

a base member,

a first holding portion that is formed on the base member and holds a substrate, and

a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein

the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and

a porous member positioned outside the first peripheral wall portion and directly under a gap between the substrate held by the first holding portion and the plate member held by the second holding portion so that the porous member thereby holds a liquid used to liquid-immersion expose the substrate and having penetrated through the gap to thereby travel directly to the porous member.

11. A substrate holding device comprising:

a base member;

a first holding portion that is formed on the base member and holds a substrate; and

a member that is held on the base member, the member having a flat portion which is substantially the same height as a top surface of the substrate held by the first holding portion, and which surrounds a circumference of the substrate held by the first holding portion, wherein

the first holding portion has a first supporting portion that supports a rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and

a porous member, positioned outside the first peripheral wall portion under a gap between the substrate held by the first holding portion and an edge of the flat portion of the member surrounding the substrate, holds a liquid having penetrated through the gap and used to liquid-immersion expose the substrate.