Substrate holding device, exposure apparatus, and device manufacturing method
First Claim
1. A substrate holding device comprising:
- a base member,a first holding portion that is formed on the base member and holds a substrate, anda second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, whereinthe first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, anda porous member positioned outside the first peripheral wall portion with the entire porous member being under a gap between the substrate held by the first holding portion and the plate member held by the second holding portion so that the porous member thereby holds a liquid having penetrated through the gap and used to liquid-immersion expose the substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
To provide a substrate holding apparatus which can prevent a liquid from entering into a rear surface side of a substrate. A substrate holding apparatus (PH) is provided with a base material (PHB), a first holding portion (PH1) formed on the base material (PHB) for holding the substrate (P), and a second holding portion (PH2) formed on the base material (PHB) for holding a plate member (T) by surrounding the circumference of a processing substrate (P) held by the first holding portion (PH1). The second holding portion (PH2) holds the plate member (T) so as to form a second space (32) on the side of the rear surface (Tb) of the plate member (T). On the rear surface (Tb) of the plate member (T), an absorbing member (100) is arranged for absorbing the liquid (LQ) entered from a gap (A) between the substrate (P) held by the first holding portion (PH1) and the plate member (T) held by the second holding portion (PH2).
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Citations
11 Claims
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1. A substrate holding device comprising:
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a base member, a first holding portion that is formed on the base member and holds a substrate, and a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and a porous member positioned outside the first peripheral wall portion with the entire porous member being under a gap between the substrate held by the first holding portion and the plate member held by the second holding portion so that the porous member thereby holds a liquid having penetrated through the gap and used to liquid-immersion expose the substrate. - View Dependent Claims (2, 3, 4, 9)
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5. A substrate holding device comprising:
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a base member, a first holding portion that is formed on the base member and holds a substrate, and a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and at least a portion of the first peripheral wall portion is formed by a porous body positioned below the substrate to thereby hold a liquid used to liquid-immersion expose the substrate and having penetrated through a gap between the substrate held by the first holding portion and the plate member held by the second holding portion, wherein the entire porous body is positioned below the gap. - View Dependent Claims (6, 7, 8)
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10. A substrate holding device comprising:
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a base member, a first holding portion that is formed on the base member and holds a substrate, and a second holding portion that is formed on the base member and holds a plate member so as to surround the circumference of the substrate held by the first holding portion, wherein the first holding portion has a first supporting portion, having a protruding shape, that supports the rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and a porous member positioned outside the first peripheral wall portion and directly under a gap between the substrate held by the first holding portion and the plate member held by the second holding portion so that the porous member thereby holds a liquid used to liquid-immersion expose the substrate and having penetrated through the gap to thereby travel directly to the porous member.
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11. A substrate holding device comprising:
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a base member; a first holding portion that is formed on the base member and holds a substrate; and a member that is held on the base member, the member having a flat portion which is substantially the same height as a top surface of the substrate held by the first holding portion, and which surrounds a circumference of the substrate held by the first holding portion, wherein the first holding portion has a first supporting portion that supports a rear surface of the substrate and a first peripheral wall portion that is formed so as to face the rear surface of the substrate and surround the first supporting portion, and a porous member, positioned outside the first peripheral wall portion under a gap between the substrate held by the first holding portion and an edge of the flat portion of the member surrounding the substrate, holds a liquid having penetrated through the gap and used to liquid-immersion expose the substrate.
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Specification