Method of manufacturing MEMS devices providing air gap control
First Claim
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1. An electromechanical device, comprising:
- a substrate;
a moveable element over the substrate and separated from the substrate by a cavity, the movable element having a deformable layer configured to move through the cavity; and
one or more flexure controllers over the substrate configured so as to operably support the moveable element and to form the cavity between the substrate and the movable element, wherein at least a portion of at least one flexure controller is connected to and overlies a portion of the deformable layer of a movable element so that the portion of the deformable layer connected to the at least one flexure controller is between the at least one flexure controller and the substrate;
wherein the at least one flexure controller includes a movable wing portion that is connected to the deformable layer of a movable element, the wing portion positioned angled away from the substrate when the deformable layer is in an unactuated state such that wing portion holds the deformable layer further away from the substrate relative to the position of the deformable layer when the wing portion is positioned parallel to the substrate.
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Abstract
Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
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Citations
11 Claims
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1. An electromechanical device, comprising:
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a substrate; a moveable element over the substrate and separated from the substrate by a cavity, the movable element having a deformable layer configured to move through the cavity; and one or more flexure controllers over the substrate configured so as to operably support the moveable element and to form the cavity between the substrate and the movable element, wherein at least a portion of at least one flexure controller is connected to and overlies a portion of the deformable layer of a movable element so that the portion of the deformable layer connected to the at least one flexure controller is between the at least one flexure controller and the substrate; wherein the at least one flexure controller includes a movable wing portion that is connected to the deformable layer of a movable element, the wing portion positioned angled away from the substrate when the deformable layer is in an unactuated state such that wing portion holds the deformable layer further away from the substrate relative to the position of the deformable layer when the wing portion is positioned parallel to the substrate. - View Dependent Claims (3)
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2. An electromechanical device, comprising:
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a substrate; a plurality of moveable elements over the substrate each movable element separated from the substrate by a cavity, and a plurality of flexure controllers over the substrate configured so as to operably support the moveable elements, wherein at least a portion of at least one flexure controller of the plurality of flexure controllers is overlying and operably supporting at least one moveable element of the plurality of moveable elements, wherein the plurality of flexure controllers control selected flexures of the plurality of moveable elements to form a plurality of cavities having different depths between the substrate and the plurality of movable elements, and wherein the one or more flexure controllers includes one or more post structures and one or more rivet structures, and wherein the post structure and the rivet structure comprise different sized members contacting the movable element.
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4. An interferometric modulator, comprising:
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first means for reflecting light; second means for reflecting light separated from the first reflecting means by a cavity, the second reflecting means having a deformable layer, and means for supporting the second reflecting means and for forming the cavity between the first reflecting means and the second reflecting means, and wherein at least a portion of the supporting means is connected to and overlies a portion the deformable layer of the second reflecting means so that the portion of the deformable layer connected to the supporting means is between the supporting means and the first means for reflecting light. - View Dependent Claims (5, 6, 7)
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8. An interferometric modulator, comprising:
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first means for reflecting light; second means for reflecting light separated from the reflecting means by a cavity, the second reflecting means having a deformable layer configured to move through the cavity; and means for supporting the second reflecting means, wherein at least a portion of the supporting means is connected to and overlies a portion of the deformable layer of the second reflecting means so that the portion of the deformable layer connected to the supporting means is between the supporting means and the first reflecting means, wherein the supporting means includes a moveable portion that is connected to the deformable layer of the second reflecting means, the moveable portion positioned angled away from the first reflecting means when the deformable layer is in an unactuated state such that the moveable portion holds the deformable layer further away from the first reflecting means relative to the position of the deformable layer when the moveable portion is positioned parallel to the first reflecting means. - View Dependent Claims (9, 10, 11)
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Specification