Angular velocity sensor utilizing coriolis force
First Claim
1. An angular velocity sensor comprising:
- a substrate;
a mass portion;
an excitation member that excites the mass portion along an excitation direction parallel to a surface of the substrate;
a beam supporting the mass portion so that the mass portion is capable of being displaced at least along (1) the excitation direction, (2) a first detecting direction that is orthogonal to the excitation direction and parallel to the surface of the substrate, and (3) a second detecting direction that is orthogonal to the surface of the substrate, the beam including a first portion and a second portion, one end of the beam being connected with the mass portion and another end of the beam being connected with the substrate;
a first detecting member disposed on the beam, the first detecting member detecting a vibration of the beam along the first detecting direction; and
a second detecting member that directly or indirectly detects a vibration of the mass portion along the second detecting direction, whereina spring constant of the first portion along the excitation direction is lower than a spring constant of the first portion along the first detecting direction, and a spring constant of the second portion along the first detecting direction is lower than a spring constant of the second portion along the excitation direction,the first portion is arranged closer to the mass portion than the second portion, andthe first detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion.
1 Assignment
0 Petitions
Accused Products
Abstract
Beams 70a, 70b, 70c and, 70d of an angular velocity sensor 100 is provided with a folded type beam 73 that has a spring constant which is smaller along the excitation direction (x-axis direction) than along a detecting direction (y-axis direction), and a straight type beam 75 that has a spring constant which is smaller along the detecting direction (y-axis direction) than along the excitation direction (x-axis direction). The folded type beam 73 is arranged closer to the mass portion 40 than the straight type beam 75. The detecting member 60 is disposed on a farther beam portion of the beam 70b, wherein the farther beam portion is arranged farther away from the mass portion 40 than the folded type beam 73.
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Citations
8 Claims
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1. An angular velocity sensor comprising:
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a substrate; a mass portion; an excitation member that excites the mass portion along an excitation direction parallel to a surface of the substrate; a beam supporting the mass portion so that the mass portion is capable of being displaced at least along (1) the excitation direction, (2) a first detecting direction that is orthogonal to the excitation direction and parallel to the surface of the substrate, and (3) a second detecting direction that is orthogonal to the surface of the substrate, the beam including a first portion and a second portion, one end of the beam being connected with the mass portion and another end of the beam being connected with the substrate; a first detecting member disposed on the beam, the first detecting member detecting a vibration of the beam along the first detecting direction; and a second detecting member that directly or indirectly detects a vibration of the mass portion along the second detecting direction, wherein a spring constant of the first portion along the excitation direction is lower than a spring constant of the first portion along the first detecting direction, and a spring constant of the second portion along the first detecting direction is lower than a spring constant of the second portion along the excitation direction, the first portion is arranged closer to the mass portion than the second portion, and the first detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An angular velocity sensor comprising:
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a substrate; a mass portion; an excitation member that excites the mass portion along an excitation direction; a beam supporting the mass portion so that the mass portion is capable of being displaced at least along (1) the excitation direction and (2) a detecting direction that is orthogonal to the excitation direction and a surface of the substrate, the beam including a first portion and a second portion, wherein one end of the beam is connected with the mass portion and another end of the beam is connected with the substrate; and a detecting member disposed on the beam, the detecting member detecting a vibration of the beam along the detecting direction, wherein a spring constant of the first portion along the excitation direction is lower than a spring constant of the first portion along the detecting direction, and a spring constant of the second portion along the detecting direction is lower than a spring constant of the second portion along the excitation direction, the first portion is arranged closer to the mass portion than the second portion, and the detecting member is disposed on a farther beam portion of the beam, wherein the farther beam portion is arranged farther away from the mass portion than the first portion.
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Specification