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Microfabricated elastomeric valve and pump systems

  • US 8,104,515 B2
  • Filed: 08/13/2009
  • Issued: 01/31/2012
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Term
First Claim
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1. A microfabricated elastomeric device comprising:

  • a planar substrate;

    a first elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel; and

    a second elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a second recess, wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel, wherein the first and second elastomeric layers form an elastomeric structure,wherein the second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel, and wherein a portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.

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