Microfabricated elastomeric valve and pump systems

• US 8,104,515 B2
• Filed: 08/13/2009
• Issued: 01/31/2012
• Est. Priority Date: 06/28/1999
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Unger, Marc A., Chou, Hou-Pu, Thorsen, Todd A., Scherer, Axel, Quake, Stephen R.
• Primary Examiner(s): Fristoe, Jr., John
• Assistant Examiner(s): Rost, Andrew J
• Application Number:
  US12/540,994
• Publication Number:
  US 20100175767A1
• Time in Patent Office: 901 Days
• Field of Search: 251/61.1, 251/61, 251/28, 251/331, 137/597, 137/833, 137/829
• US Class Current: 137/833
• CPC Class Codes: B01L 2300/0861 Configuration of multiple channels and/or chambers in a single devices
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/123 Flexible; Elastomeric
• CPC Class Codes: B01L 2400/046 Chemical or electrochemical formation of bubbles
• CPC Class Codes: B01L 2400/0481 squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 pinch valves
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B29C 51/00 Shaping by thermoforming , i.e. shaping sheets or sheet like preforms after heating, e.g. shaping sheets in matched moulds or by deep-drawing; Apparatus therefor blow moulding of tubular preforms B29C49/00, deforming of tubular or hollow preforms B29C67/0014
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: B81B 2201/036 Micropumps
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 2201/034 Moulding
• CPC Class Codes: C12Q 1/6874 involving nucleic acid arrays, e.g. sequencing by hybridisation
• CPC Class Codes: C12Q 2535/125 Allele specific primer extension
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 43/14 : having plate-like flexible members
• CPC Class Codes: F15C 1/06 : Constructional details; Selection of specified materials ; Constructional realisation of one single element; Canal shapes; Jet nozzles; Assembling an element with other devices, only if the element forms the main part F15C5/00 takes precedence
• CPC Class Codes: F15C 5/00 : Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 1/20 : with axis of rotation arranged externally of valve member
• CPC Class Codes: F16K 11/20 : operated by separate actuating members with one plug turning in another F16K11/12
• CPC Class Codes: F16K 13/00 : Other constructional types of cut-off apparatus means for plugging pipes or hoses F16L55/10; Arrangements for cutting-off
• CPC Class Codes: F16K 2099/0074 : using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 : using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 : using moulding or stamping
• CPC Class Codes: F16K 2099/008 : Multi-layer fabrications
• CPC Class Codes: F16K 2099/0094 : Micropumps
• CPC Class Codes: F16K 31/126 : the fluid acting on a diaphragm, bellows, or the like F16K31/145, F16K31/165, F16K31/365, F16K31/385 take precedence
• CPC Class Codes: F16K 99/0001 : Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 : Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0046 : using magnets
• CPC Class Codes: F16K 99/0048 : using piezoelectric means
• CPC Class Codes: F16K 99/0051 : using electrostatic means
• CPC Class Codes: F16K 99/0059 : actuated by a pilot fluid
• CPC Class Codes: Y10T 137/0491 : Valve or valve element assembling, disassembling, or replacing
• CPC Class Codes: Y10T 137/0497 : Fluid actuated or retarded
• CPC Class Codes: Y10T 137/2224 : Structure of body of device
• CPC Class Codes: Y10T 137/87249 : Multiple inlet with multiple outlet
• CPC Class Codes: Y10T 137/87981 : Common actuator
• CPC Class Codes: Y10T 156/10 : Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 428/24479 : including variation in thickness
• CPC Class Codes: Y10T 428/24744 : Longitudinal or transverse tubular cavity or cell

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Claims

1. A microfabricated elastomeric device comprising:

a planar substrate;

a first elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel; and

a second elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a second recess, wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel, wherein the first and second elastomeric layers form an elastomeric structure,

wherein the second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel, and wherein a portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.

2. The microfabricated elastomeric device of claim 1, wherein the first and second flow channels both pass through the elastomeric structure.

3. The microfabricated elastomeric device of claim 1, wherein the second flow channel passes through the elastomeric structure and the first flow channel passes along a surface of the elastomeric structure.

4. The microfabricated elastomeric device of claim 1 wherein the first and second flow channels have a depth between 0.2 and 250 microns.

5. The microfabricated elastomeric device of claim 1, wherein the deflectable portion is made from the same material as the first elastomeric layer.

6. The microfabricated elastomeric device of claim 1, wherein the first elastomeric layer and the second elastomeric layer are both made form an elastomeric material having a Young'"'"'s modulus of between about 20 Pa-1 GPa.

7. The microfabricated elastomeric device of claim 1 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 100 aL to 100 nL.

8. The microfabricated elastomeric device of claim 1 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 fL to 10 nL.

9. The microfabricated elastomeric device of claim 1 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 100 fL to 1 nL.

10. The microfabricated elastomeric device of claim 1 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 pL to 100 pL.

11. The microfabricated elastomeric device of claim 1 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 aL to 1 μ

L.

12. A microfabricated elastomeric device comprising:

a planar substrate,

a first elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel;

a second elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a second recess, wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel, and wherein the second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel; and

an elastomeric membrane bonded between the first and the second elastomeric layers, separating the first flow channel and the second flow channel, wherein the membrane is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.

13. The microfabricated elastomeric device of claim 12, wherein the first flow channel experiences a reduced pressure which causes the membrane to deflect into the first flow channel.

14. The microfabricated elastomeric device of claim 12, wherein the first and second elastomeric layers comprise a material selected from the group consisting of:

polyisoprene, polybutadiene, polychloroprene, polyisobutylene, poly(styrene-butatdiene-styrene), the polyurethanes, and silicones.

15. The microfabricated elastomeric device of claim 12, wherein the first and second elastomeric layers comprise a material selected from the group consisting of:

poly(bis(fluoroalkoxy)phosphazene), poly(carborane-siloxanes), poly(1-butene), poly(chlorotrifluoroethylene-vinyldene fluoride) copolymers, poly(ethyl vinyl ether), poly(vinylidene fluoride), poly(vinylidene fluoride-hexafluoropropylene) copolymer.

16. The microfabricated elastomeric device of claim 12, wherein the first and second elastomeric layers comprise a material selected from the group consisting of:

elastomer compositions of polyvinylchloride, polysulfone, polycarbonate, polymethylmethacrylate, or polytertrafluoroethylene.

17. The microfabricated elastomeric device of claim 12, wherein the membrane is composed of an elastomeric material different than that forming the first or the second elastomeric layers.

18. The microfabricated elastomeric device of claim 12, wherein the membrane is composed of an elastomeric material the same as that forming the first or the second elastomeric layers.

19. The microfabricated elastomeric device of claim 12 wherein the membrane is characterized by a dead volume wherein the dead volume is 100 aL to 100 nL.

20. The microfabricated elastomeric device of claim 12 wherein the membrane is characterized by a dead volume wherein the dead volume is 1 fL to 10 nL.

21. The microfabricated elastomeric device of claim 12 wherein the membrane is characterized by a dead volume wherein the dead volume is 100 fL to 1 nL.

22. The microfabricated elastomeric device of claim 12 wherein the membrane is characterized by a dead volume wherein the dead volume is 1 pL to 100 pL.

23. The microfabricated elastomeric device of claim 12 wherein the membrane is characterized by a dead volume wherein the dead volume is 1 aL to 1 μ

L.

24. The microfabricated elastomeric device of claim 12 wherein the first and second flow channels have a depth between 0.2 and 250 microns.

25. A microfabricated elastomeric device comprising:

a planar substrate;

a first elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel with a top and a bottom wherein the top of the first flow channel has a curved surface; and

a second elastomeric layer having a top surface and a bottom surface, the bottom surface comprising a second recess, wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel,

wherein the second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel, and wherein a portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.

26. The microfabricated elastomeric device of claim 25 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 100 aL to 100 nL.

27. The microfabricated elastomeric device of claim 25 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 fL to 10 nL.

28. The microfabricated elastomeric device of claim 25 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 100 fL to 1 nL.

29. The microfabricated elastomeric device of claim 25 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 pL to 100 pL.

30. The microfabricated elastomeric device of claim 25 wherein the deflectable portion is characterized by a dead volume wherein the dead volume is 1 aL to 1 μ

L.

31. The microfabricated elastomeric device of claim 25 wherein the first and second flow channels have a depth between 0.2 and 250 microns.