Micro hemispheric resonator gyro
First Claim
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1. An apparatus, comprising:
- a plurality of pickoff and forcer electrodes;
a hemispheric resonator;
a guard ring having first and second opposed sides, the guard ring encompassing the plurality of pickoff and forcer electrodes, and the hemispheric resonator;
a top cover operatively coupled to the first side of the guard ring; and
a bottom cover operatively coupled to the second side of the guard ring;
wherein the plurality of pickoff and forcer electrodes, the guard ring, the top cover and the bottom cover may be formed from single crystal silicon; and
wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a batch-fabricated micro hemispheric resonator gyro.
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Abstract
One embodiment is a micro hemispheric resonator gyro having: a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; a top cover operatively coupled to the first side of the guard ring; and a bottom cover operatively coupled to the second side of the guard ring; wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a micro hemispheric resonator gyro.
27 Citations
16 Claims
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1. An apparatus, comprising:
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a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring encompassing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; a top cover operatively coupled to the first side of the guard ring; and a bottom cover operatively coupled to the second side of the guard ring; wherein the plurality of pickoff and forcer electrodes, the guard ring, the top cover and the bottom cover may be formed from single crystal silicon; and wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a batch-fabricated micro hemispheric resonator gyro. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A batch-fabricated micro hemispheric resonator gyro, comprising:
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at least first, second and third silicon layers; the first layer having a top cover; the second silicon layer having a plurality of pickoff and forcer electrodes, a hemispheric resonator and a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; the third layer having a bottom cover; the top cover operatively coupled to the first side of the guard ring; the bottom cover operatively coupled to the second side of the guard ring; the plurality of pickoff and forcer electrodes, the guard ring, the top cover and the bottom cover being formed from single crystal silicon. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification