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Semiconductor device with transistor, conductive pad, and contact

  • US 8,110,872 B2
  • Filed: 11/18/2009
  • Issued: 02/07/2012
  • Est. Priority Date: 11/19/2008
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a transistor;

    a conductive pad being electrically connected to the transistor, the conductive pad comprising a first region and a second region;

    a contact being electrically connected to the conductive pad, wherein at least a main part of the first region overlaps the transistor in plan view, at least a main part of the second region does not overlap the transistor in plan view, at least a main part of the contact overlaps the second region in plan view, the at least main part of the contact does not overlap the first region in plan view, and the at least main part of the contact does not overlap the transistor in plan view; and

    a pad contact layer disposed between an upper diffusion layer of the transistor and the first region of the conductive pad,wherein the pad contact layer overlaps the upper diffusion layer and the first region of the conductive pad in plan view, andthe pad contact layer reduces a contact resistance between the upper diffusion layer and the first region of the conductive pad.

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