Electromagnetic and thermal sensors using carbon nanotubes and methods of making same

• US 8,110,883 B2
• Filed: 03/12/2008
• Issued: 02/07/2012
• Est. Priority Date: 03/12/2007
• Status: Active Grant

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Egerton, Elwood James, Sen, Rahul, Segal, Brent M.
• Primary Examiner(s): Wilson, Allan R
• Application Number:
  US12/046,855
• Publication Number:
  US 20080251723A1
• Time in Patent Office: 1,427 Days
• Field of Search: 257/428, 257/467, 257/E31.053
• US Class Current: 257/428
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/023 Particular leg structure or construction or shape; Nanotubes
• CPC Class Codes: G01J 5/046 Materials; Selection of thermal materials
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0846 having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
• CPC Class Codes: G01J 5/0853 having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G01J 5/24 Use of specially adapted circuits, e.g. bridge circuits
• CPC Class Codes: G01T 1/16 Measuring radiation intensity G01T1/29 takes precedence ; self-powered detectors G01T3/006; using an ionisation chamber filled with a liquid or solid, e.g. frozen liquid, dielectric G01T3/008

Abstract

Electromagnetic radiation detecting and sensing systems using carbon nanotube fabrics and methods of making the same are provided. In certain embodiments of the invention, an electromagnetic radiation detector includes a substrate, a nanotube fabric disposed on the substrate, the nanotube fabric comprising a non-woven network of nanotubes, and first and second conductive terminals, each in electrical communication with the nanotube fabric, the first and second conductive terminals disposed in space relation to one another. Nanotube fabrics may be tuned to be sensitive to a predetermined range of electromagnetic radiation such that exposure to the electromagnetic radiation induces a change in impedance between the first and second conductive terminals. The detectors include microbolometers, themistors and resistive thermal sensors, each constructed with nanotube fabric. Nanotube fabric detector arrays may be formed for broad-range electromagnetic radiation detecting. Methods for making nanotube fabric detectors, arrays, microbolometers, thermistors and resistive thermal sensors are each described.

Claims

1. An electromagnetic radiation detector comprising:

a substrate;

a nanotube fabric disposed on the substrate, the nanotube fabric comprising a non-woven network of nanotubes and

first and second conductive terminals, each in electrical communication with the nanotube fabric, the first and second conductive terminals disposed in space relation to one another;

wherein the nanotube fabric is tuned and derivitized to be sensitive to a predetermined range of electromagnetic radiation such exposure to the electromagnetic radiation generates a temperature change in the fabric that induces a change in the nanotube fabric resistance between the first and second conductive terminals.

2. The detector of claim 1 wherein the detector further comprises sensing circuitry for detecting the change in resistance, the sensing circuitry integrated with CMOS circuitry.

3. The detector of claim 1 wherein the nanotube fabric is functionalized to be sensitive to the predetermined range of electromagnetic radiation.

4. The detector of claim 1 wherein the substrate comprises a dielectric material.

5. The detector of claim 1 wherein the predetermined range of electromagnetic radiation comprises IR radiation and the active region of the nanotube fabric has a thermal coefficient of resistance between approximately 1% per degree C. and approximately 4% per degree C.

6. The detector of claim 1 wherein the electromagnetic radiation comprises UV radiation.

7. The detector of claim 1 wherein the nanotube fabric comprises one of a multilayer fabric and a monolayer fabric.

8. The detector of claim 1 wherein the nanotube fabric further comprises semiconducting nanoparticles, the nanotube fabric tuned such that exposure to a selected photon energy induces the change in resistance between the first and second conductive terminals.

9. The detector of claim 1 wherein the nanotube fabric comprises dye-sensitized nanoparticles.

10. The detector of claim 1 wherein the nanotube fabric comprises electromagnetic radiation-sensitive nanoparticles including at least one of VOx, amorphous silicon and Ti particles.

11. The detector of claim 1, wherein the predetermined range of electromagnetic radiation comprises thermal radiation and the nanotube fabric is tuned to have a selected thermal coefficient of resistance (TCR).

12. The thermal detector of claim 11, wherein the TCR comprises a positive value.

13. The thermal detector of claim 11, wherein the TCR comprises a negative value.

14. The thermal detector of claim 12, wherein the selected TCR is tuned through one of doping and functionalizing the nanotube fabric.