Phase and frequency control of a radio frequency generator from an external source
First Claim
Patent Images
1. A radio frequency (RF) generator comprising:
- a RF power source;
a sensor coupled to the RF power source;
a sensor signal processing unit including a controller coupled to a derivative function component and coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external RF generator and to generate a control signal to control at least one of phase or frequency of the RF generator, the signal processing unit being operable to generate the control signal,wherein the sensor signal processing unit includes a field programmable gate array (FPGA) unit and a digital signal processing unit and wherein the FPGA unit is operable to receive a phase and frequency input signal.
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Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
85 Citations
15 Claims
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1. A radio frequency (RF) generator comprising:
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a RF power source; a sensor coupled to the RF power source; a sensor signal processing unit including a controller coupled to a derivative function component and coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external RF generator and to generate a control signal to control at least one of phase or frequency of the RF generator, the signal processing unit being operable to generate the control signal, wherein the sensor signal processing unit includes a field programmable gate array (FPGA) unit and a digital signal processing unit and wherein the FPGA unit is operable to receive a phase and frequency input signal. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A radio frequency (RF) generator system comprising:
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a first RF generator generating an output; and a second RF generator, the second RF generator including; a RF power source; a sensor coupled to the power source; and a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive the output from the first RF generator and to generate a control signal to control at least one of phase or frequency of the second RF generator. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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Specification