Multi-stable micro electromechanical switches and methods of fabricating same

• US 8,111,118 B2
• Filed: 03/04/2010
• Issued: 02/07/2012
• Est. Priority Date: 04/29/2003
• Status: Expired due to Fees

• Current Assignee: Medtronic Incorporated (Medtronic Plc)
• Original Assignee: Medtronic Incorporated (Medtronic Plc)
• Inventors: Receveur, Rogier, Habets, Philippe, Danzl, Ralph B., Mattes, Michael F., Houben, Richard P. M.
• Primary Examiner(s): Rojas, Bernard
• Application Number:
  US12/717,406
• Publication Number:
  US 20100155204A1
• Time in Patent Office: 705 Days
• Field of Search: 335/78, 200/181
• US Class Current: 335/78
• CPC Class Codes: B81B 2201/018 Switches not provided for in B81B2201/014 - B81B2201/016
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0054 For holding or placing an element in a given position
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.

Claims

1. A method of forming a micro electromechanical switch on a substrate, the method comprising the steps of:

forming an insulating layer on the substrate;

forming a conducting layer on the insulating layer;

creating one or more gaps in at least the conducting layer to isolate at least one moveable member from at least one receiving terminal of the switch, wherein one or more corner regions of the at least one moveable member and the at least one receiving terminal are formed proximate at least one gap of the one or more gaps; and

applying a conductive coating to substantially encapsulate the conducting layer and to form protruding regions at the one or more corner regions on the at least one moveable member and the at least one receiving terminal, the protruding regions extending into the at least one gap.

2. The method of claim 1 further comprising the step of etching a bottom side of the at least one moveable member.

3. The method of claim 1 further comprising the step of patterning the conducting layer to create the one or more gaps.

4. The method of claim 3 wherein the applying step comprises the step of providing an electric current to the conducting layer to thereby electroplate the conductive coating on the conducting layer.

5. The method of claim 1 wherein the applying step comprises applying electroless gold.

6. The method of claim 1, wherein the substrate comprises a sacrificial layer, and further wherein the method comprises the step of removing at least a portion of the sacrificial layer.

7. A multi-stable electromechanical switch having an open state and a closed state, the electromechanical switch comprising:

a moveable member;

at least one pair of receiving terminals biased to a bias position corresponding to the open state, wherein each terminal of the at least one pair of receiving terminals interfaces with the moveable member in the closed state; and

an actuating circuit to provide electrostatic energy to displace the at least one pair of receiving terminals from the bias position, and to displace the moveable member toward the bias position;

wherein the at least one pair of receiving terminals return toward the bias position when the electrostatic energy is removed to create an electrical connection between the at least one pair of receiving terminals and the moveable member, and thereby retaining the electromechanical switch in the closed state.

8. The electromechanical switch of claim 7 wherein the moveable member comprises a conducting portion having at least one protruding region configured to interface with the at least one pair of receiving terminals.

9. The electromechanical switch of claim 7 wherein the actuating circuit comprises a comb actuator.

10. The electromechanical switch of claim 7 wherein the at least one pair of receiving terminals comprises two pairs of receiving terminals, and wherein the closed state of each of the two pairs of receiving terminals corresponds to a different state of the electromechanical switch.

11. The electromechanical switch of claim 7 wherein each of the at least one pair of receiving terminals comprises an outcropping configured to contact with the moveable member.

12. The electromechanical switch of claim 7 further comprising a dielectric material located in proximity to the actuating circuit.

13. A method of switching an electromechanical switch from an open state to a closed state, the method comprising the steps of:

displacing a pair of receiving terminals from a biased position corresponding to the open state;

moving a moveable member between the pair of receiving terminals to thereby occupy space occupied by at least a portion of the pair of receiving terminals when in the biased position, wherein at least one of displacing the pair of receiving terminals and moving the moveable member are executed at least in part with electrostatic energy; and

discontinuing the electrostatic energy and allowing the pair of receiving terminals to return toward the biased position to place the pair of receiving terminals in contact with the moveable member such that the electromechanical switch is in the closed state.

14. The method of claim 13 wherein the displacing step and the moving step are executed at least in part with electrostatic energy.

15. A multi-stable electromechanical switch having a moveable member and a pair of receiving terminals, the electromechanical switch comprising:

means for displacing the pair of receiving terminals from a biased position corresponding to the open state;

means for moving the moveable member between the pair of receiving terminals to thereby occupy space occupied by at least a portion of the pair of receiving terminals when in the biased position, wherein at least one of the displacing means and the moving means comprises means for providing electrostatic energy; and

means for discontinuing the electrostatic energy and allowing the pair of receiving terminals to return toward the biased position to place the pair of receiving terminals in contact with the moveable member such that the electromechanical switch is in the closed state.