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Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same

  • US 8,113,050 B2
  • Filed: 01/25/2006
  • Issued: 02/14/2012
  • Est. Priority Date: 01/25/2006
  • Status: Active Grant
First Claim
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1. An apparatus with six degrees of freedom and driven in anti-phase for passive relaxation of sense mode phase matching requirements comprising:

  • a first and second three degree-of-freedom (3-DOF) subsystem coupled with each other in a drive-mode and driven into anti-phase oscillation to substantially reject common-mode stimuli,where each of the first and second 3-DOF subsystems comprise two proof masses and a decoupling frame, the two proof masses in each 3-DOF subsystem being collectively arranged and configured to function as both a 1-DOF drive oscillator and 2-DOF sense oscillator,where in each of the first and second 3-DOF subsystems the 1-DOF drive oscillator and 2-DOF sense oscillator are mechanically decoupled from each other and a substrate via the decoupling frame,where the two 1-DOF drive oscillators in the first and second 3-DOF subsystems are coupled with each other to collectively function as a 2-DOF coupled system and to provide a common anti-phase drive-mode resonant frequency at which the first and second 3-DOF subsystems oscillate in opposite directions,and where the two 2-DOF sense-mode oscillators in the first and second 3-DOF subsystems each provide a flat range in frequency response where the response gain and phase are stable to provide robustness to imperfections and environmental influences, and to provide matching of sense-mode amplitude and phase of the first and second 3-DOF subsystems.

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