Capacitive accelerometer
First Claim
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1. A capacitive accelerometer comprising:
- a substrate;
a sensing mass body disposed above and spaced apart from the substrate, and comprising a mass main body, a support spring, and a sensing electrode;
a support part configured to couple the sensing mass body to the substrate;
a reference electrode disposed adjacent to the sensing electrode and movable with respect to the sensing electrode;
a driving unit configured to move the reference electrode to adjust a distance between the reference electrode and the sensing electrode; and
a stopper configured to limit the motion of the reference electrode.
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Abstract
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
16 Citations
16 Claims
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1. A capacitive accelerometer comprising:
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a substrate; a sensing mass body disposed above and spaced apart from the substrate, and comprising a mass main body, a support spring, and a sensing electrode; a support part configured to couple the sensing mass body to the substrate; a reference electrode disposed adjacent to the sensing electrode and movable with respect to the sensing electrode; a driving unit configured to move the reference electrode to adjust a distance between the reference electrode and the sensing electrode; and a stopper configured to limit the motion of the reference electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A capacitive accelerometer comprising:
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a substrate; a reference electrode fixed to the substrate; a sensing mass body disposed above and spaced apart from the substrate, comprising a sensing electrode disposed adjacent to the reference electrode, a support spring, and a mass main body, and movable with respect to the reference electrode; a driving unit configured to move the sensing mass body to adjust a distance between the reference electrode and the sensing electrode; and a stopper configured to limit the motion of the sensing mass body caused by the driving unit. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A capacitive accelerometer comprising:
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a substrate; a reference electrode disposed above and spaced apart from the substrate; a sensing electrode disposed above and spaced apart from the substrate and configured to interdigitate with the reference electrode; a driving unit configured to adjust a relative distance between the reference electrode and the sensing electrode; and a stopper configured to limit an adjustment distance by the driving unit.
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Specification