Structure of capacitor set

• US 8,114,752 B2
• Filed: 02/06/2010
• Issued: 02/14/2012
• Est. Priority Date: 07/04/2006
• Status: Active Grant

• Current Assignee: Marlin Semiconductor Limited (f/k/a Sandyford Semiconductor Limited) (Vector Capital Corporation)
• Original Assignee: United Microelectronics Corporation
• Inventors: Liang, Victor Chiang, Yang, Chien-Kuo, Tseng, Hua-Chou, Ko, Chun-Yao, Fan, Cheng-Wen, Chiang, Yu-Ho, Tzeng, Chih-Yuh
• Primary Examiner(s): Garber, Charles
• Assistant Examiner(s): MUSTAPHA, ABDULFATTAH B
• Application Number:
  US12/701,521
• Publication Number:
  US 20100140741A1
• Time in Patent Office: 738 Days
• Field of Search: 438/238, 438/253, 438/382, 438/396, 257/296, 257/298, 257/307, 257/E21.009, 257/E21.021, 257/E27.048
• US Class Current: 438/382
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 28/87 made by depositing layers, e.g. by depositing alternating conductive and insulating layers
• CPC Class Codes: H01L 28/91 made by depositing layers, e.g. by depositing alternating conductive and insulating layers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A structure of a capacitor set is described, including at least two capacitors that are disposed at the same position on a substrate and include a first capacitor and a second capacitor. The first capacitor includes multiple first capacitor units electrically connected with each other in parallel. The second capacitor includes multiple second capacitor units electrically connected with each other in parallel. The first and the second capacitor units are arranged spatially intermixing with each other to form an array.

Claims

1. A structure of a capacitor set, comprising at least two capacitor sets disposed on a substrate, wherein the two capacitor sets comprise:

a first capacitor set, comprising a plurality of first capacitor units connected in parallel for constituting the first capacitor set; and

a second capacitor set, comprising a plurality of second capacitor units connected in parallel for constituting the second capacitor set,

wherein the first and the second capacitor units are the same in number, have identical capacitance per capacitor unit, and spatially intermixed with each other to form a multidimensional array.

2. The structure of claim 1, wherein the first and the second capacitor units are arranged in a two-dimensional (2D) array in one plane.

3. The structure of claim 2, wherein the plane is parallel or perpendicular to a surface of the substrate.

4. The structure of claim 1, wherein the first and the second capacitor units are arranged in a three-dimensional (3D) array.

5. The structure of claim 4, wherein the first and the second capacitor units are arranged alternately in a first and a second dimensional directions of the 3D array but repeatedly in a third dimensional direction of the 3D array.

6. The structure of claim 5, wherein the first and the second dimensional directions are parallel to a surface of the substrate, and the third dimensional direction is perpendicular to the surface of the substrate.

7. The structure of claim 5, wherein the first and the third dimensional directions are parallel to a surface of the substrate, and the second dimensional direction is perpendicular to the surface of the substrate.

8. The structure of claim 1, wherein the first and the second capacitor sets comprise MOM capacitors or MIM capacitors.

9. The structure of claim 1, wherein

each of the first capacitor units comprises a first electrode, a second electrode and a dielectric material between the first and the second electrodes;

each of the second capacitor units comprises a third electrode, a fourth electrode and the dielectric material between the third and the fourth electrodes;

in the first capacitor units, all of the first electrodes are electrically connected with each other and all of the second electrodes are electrically connected with each other; and

in the second capacitor units, all of the third electrodes are electrically connected with each other and all of the fourth electrodes are electrically connected with each other.

10. The structure of claim 9, wherein the first and the second capacitor sets comprise MOM capacitors, and each of the first to fourth electrodes has a comb-like structure.

11. A structure of a capacitor set, comprising:

a plurality of first capacitor units in communication with each other on a substrate, the plurality of first capacitor units being spatially isolated from each other; and

a plurality of second capacitor units in communication with each other on the substrate, the plurality of second capacitor units being spatially isolated from each other and electrically isolated from the plurality of first capacitor units;

wherein the first capacitor units and the second capacitor units are the same in number, have identical capacitance per capacitor unit, and are spatially intermixed with each other to form a multidimensional array.

12. The structure of claim 11, wherein the first and the second capacitor units are arranged in a two-dimensional (2D) array in one plane.

13. The structure of claim 12, wherein the plane is parallel or perpendicular to a surface of the substrate.

14. The structure of claim 11, wherein the first and the second capacitor units are arranged in a three-dimensional (3D) array.

15. The structure of claim 11, wherein the first and the second capacitors comprise MOM capacitors or MIM capacitors.

16. The structure of claim 11, wherein

each of the first capacitor units comprises a first electrode, a second electrode and a dielectric material between the first and the second electrodes;

each of the second capacitor units comprises a third electrode, a fourth electrode and the dielectric material between the third and the fourth electrodes;

in the first capacitor units, all of the first electrodes are electrically connected with each other and all of the second electrodes are electrically connected with each other; and

in the second capacitor units, all of the third electrodes are electrically connected with each other and all of the fourth electrodes are electrically connected with each other.

17. The structure of claim 16, wherein the first and the second capacitor units comprise MOM-type capacitor units, and each of the first to fourth electrodes has a comb-like structure.

18. A structure of a capacitor set, comprising at least two capacitor sets disposed on a substrate, wherein the two capacitor sets comprise:

a first capacitor set, comprising a plurality of first capacitor units connected in parallel for constituting the first capacitor set; and

a second capacitor set, comprising a plurality of second capacitor units connected in parallel for constituting the second capacitor set,

wherein the first and the second capacitor units are the same in number, have identical capacitance per capacitor unit, and spatially intermixed with each other to form a multidimensional array, the first and the second capacitor units are arranged in a three-dimensional (3D) array and are arranged alternately in each of three dimensional directions of the 3D array.

19. The structure of claim 18, wherein the three dimensional directions are perpendicular to each other and include two directions parallel to a surface of the substrate and one direction perpendicular to the surface of the substrate.

20. A structure of a capacitor set, comprising:

a plurality of first capacitor units in communication with each other on a substrate, the plurality of first capacitor units being spatially isolated from each other; and

a plurality of second capacitor units in communication with each other on the substrate, the plurality of second capacitor units being spatially isolated from each other and electrically isolated from the plurality of first capacitor units;

wherein the first capacitor units and the second capacitor units are the same in number, have identical capacitance per capacitor unit, and are spatially intermixed with each other to form a multidimensional array, the first and the second capacitor units are arranged in a three-dimensional (3D) array and are arranged alternately in each of three dimensional directions of the 3D array.