Driving apparatus, industrial instrument, exposure apparatus, and device manufacturing method

• US 8,115,425 B2
• Filed: 11/10/2008
• Issued: 02/14/2012
• Est. Priority Date: 03/03/2008
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Motegi, Yasuhiro
• Primary Examiner(s): Benson, Walter
• Assistant Examiner(s): Glass, Erick
• Application Number:
  US12/267,965
• Publication Number:
  US 20090218964A1
• Time in Patent Office: 1,191 Days
• Field of Search: 318/135, 318/695, 318/696, 361/695, 361/696
• US Class Current: 318/135
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: H05K 7/20209 Thermal management, e.g. fan control

Abstract

A driving apparatus electrically drives first and second components built in an industrial instrument. The first component drives a first element, and the second component drives a second element at a velocity higher than that of the first component. The driving apparatus includes a housing including a supply inlet and an exhaust outlet. A fan forms an air current so that air is taken into the housing through the supply inlet and is exhausted from inside the housing through the exhaust outlet. A driving circuit block is accommodated in the housing so as to be cooled by the air current, and includes a first driving circuit to electrically drive the first component, and a second driving circuit to electrically drive the second component. The second driving circuit is inserted upstream of the first driving circuit along the air current in the housing. A cooling unit regulates a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.

Claims

1. A driving apparatus which electrically drives first and second components built in an industrial instrument, the first component being configured to drive a first element, and the second component being configured to drive a second element at a velocity higher than that of the first component, the driving apparatus comprising:

a housing including a supply inlet and an exhaust outlet;

a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and which includes a first driving circuit configured to electrically drive the first component, and a second driving circuit configured to electrically drive the second component, wherein said second driving circuit is inserted upstream of said first driving circuit along the air current in said housing; and

a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

2. The apparatus according to claim 1, further comprising a first controller configured to control a cooling capacity of said cooling unit based on a heating value of said driving circuit block.

3. The apparatus according to claim 2, wherein said first controller controls the cooling capacity of said cooling unit based on an estimate of the heating value of said driving circuit block according to a state of said driving circuit block.

4. The apparatus according to claim 1, further comprising:

a temperature sensor configured to detect the temperature of the air exhausted from inside said housing through said exhaust outlet; and

a second controller configured to control a cooling capacity of said cooling unit based on the output from said temperature sensor.

5. The apparatus according to claim 1, wherein said cooling unit includes a heat exchanger, and a cooling capacity of said cooling unit is controlled by a flow rate of a fluid supplied to said heat exchanger.

6. The apparatus according to claim 1, wherein

the industrial instrument includes an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stag;

to expose the substrate to light, and

the first component includes a first driving mechanism which drives the substrate stage, and the second component includes a second driving mechanism which drives the original stage.

7. An industrial instrument including first and second components and a driving apparatus which electrically drives the first and second components, the first component being configured to drive a second element at a velocity higher than that of the first component,

wherein the driving apparatus comprises:

(i) a housing including a supply inlet and an exhaust outlet;

(ii) a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

(iii) a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and which includes a first driving circuit configured to electrically drive the first component, and a second diving circuit configured to electrically drive the second component, wherein said second driving circuit is inserted upstream of said first driving circuit along the air current in said housing; and

(iv) a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

8. An exposure apparatus including an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stage to expose the substrate to light, and a driving apparatus which drives first and second components of the exposure unit, the first component being configured to drive a first element of the exposure unit, and the second component being configured to drive a second element of the exposure unit at a velocity higher than that of the first component,

wherein the driving apparatus comprises:

(i) a housing including a supply inlet and an exhaust outlet;

(ii) a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

(iii) a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and which includes a first driving circuit configured to electrically drive the first component, and a second driving circuit configured to electrically drive the second component, wherein said second driving circuit is inserted upstream of said first driving circuit along the air current in said housing; and

(iv) a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

9. A device manufacturing method comprising the steps of:

(A) exposing a substrate to light by an exposure apparatus; and

(B) developing the substrate exposed in the exposing step,

wherein the exposure apparatus includes (a) an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stag;

to expose the substrate to light, and (b) a driving apparatus which drives first and second components of the exposure unit, the first component being configured to drive a first element, and the second component being configured to drive a second element at a velocity higher than that of the first component, and

the driving apparatus comprises;

(i) a housing including a supply inlet and an exhaust outlet;

(ii) a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

(iii) a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and which includes a first driving circuit configured to electrically drive the first component, and a second driving circuit configured to electrically drive the second component, wherein said second driving circuit is inserted upstream of said first driving circuit along the air current in said housing; and

(iv) a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.