Sensor for detecting high frequency signals
First Claim
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1. A sensor that senses incident energy, the sensor comprising:
- a receiver capable of receiving incident energy;
a MEMS, wherein a first portion of the MEMS is electrically coupled to the receiver, wherein a second portion of the MEMS is capable of being deflected by an amount upon receipt of the received incident energy via a change in potential within a known electrical field, and wherein the amount of deflection of the second portion of the MEMS corresponds to an amount of received incident energy; and
a detection system including a detection source that applies a detection beam to the second portion of the MEMS, wherein the detection beam interacts with the second portion of the MEMS to thereby provide an affected detection beam, and wherein a characteristic of the affected detection beam varies correspondingly to the amount of deflection of the second portion of the MEMS, wherein the detection system further includes a detector that detects the varying characteristic of the affected detection beam, and wherein the detected varying characteristic of the affected detection beam is used to determine the received incident energy.
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Abstract
A sensor that senses incident RF signals is provided. The sensor is capable of sensing signals in the Gigahertz (GHz) and Terahertz (THz) range. The sensor may utilize one or more cantilevers, an interferometer, or may be formed in a box-type configuration.
71 Citations
24 Claims
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1. A sensor that senses incident energy, the sensor comprising:
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a receiver capable of receiving incident energy; a MEMS, wherein a first portion of the MEMS is electrically coupled to the receiver, wherein a second portion of the MEMS is capable of being deflected by an amount upon receipt of the received incident energy via a change in potential within a known electrical field, and wherein the amount of deflection of the second portion of the MEMS corresponds to an amount of received incident energy; and a detection system including a detection source that applies a detection beam to the second portion of the MEMS, wherein the detection beam interacts with the second portion of the MEMS to thereby provide an affected detection beam, and wherein a characteristic of the affected detection beam varies correspondingly to the amount of deflection of the second portion of the MEMS, wherein the detection system further includes a detector that detects the varying characteristic of the affected detection beam, and wherein the detected varying characteristic of the affected detection beam is used to determine the received incident energy. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A sensor that senses incident energy, the sensor comprising:
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a receiver capable of receiving incident energy; a MEMS, wherein a first portion of the MEMS is electrically coupled to the receiver, wherein a second portion of the MEMS oscillates at a first frequency and a first magnitude when the received incident energy is below a first predetermined threshold, wherein the second portion of the MEMS oscillates at a second frequency and a second magnitude when the received incident energy is above a second predetermined threshold; and a detection system including a detection source that applies a detection beam to the second portion of the MEMS, wherein the detection beam interacts with the second portion of the MEMS to thereby provide an affected detection beam, wherein a characteristic of the affected detection beam varies correspondingly to the oscillations of the MEMS, wherein the detection system further includes a detector that detects the varying characteristic of the affected detection beam, and wherein the detected varying characteristic of the affected detection beam is used to determine the received incident energy. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification