Method and system for packaging a MEMS device

• US 8,115,983 B2
• Filed: 04/14/2009
• Issued: 02/14/2012
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Miles, Mark W., Sampsell, Jeffrey B.
• Primary Examiner(s): Mack, Ricky
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US12/423,531
• Publication Number:
  US 20090257109A1
• Time in Patent Office: 1,036 Days
• Field of Search: 359/238, 359290-295, 359/260, 359/298, 359/489, 359/497, 359/580, 359/599, 257/431, 257/432, 257/433, 257/434, 257/680, 257/682, 257/689, 257/737, 257/738, 257/777, 257/778, 257/779, 257/780, 438/53, 438/109, 438/125, 438/116, 362/300, 362/241, 362/479, 362/483, 362/517, 362/560
• US Class Current: 359/238
• CPC Class Codes: B81C 1/0023 Packaging together an electronic processing unit die and a micromechanical structure die MEMS packages B81B7/0032; MEMS packaging processes B81C1/00261
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

Claims

1. A display device, comprising:

an array of interferometric modulators disposed on a first surface of a transparent substrate;

a carrier comprising a first surface and a second surface, wherein a first surface of the carrier is sealed to said transparent substrate to form a package encapsulating the interferometric modulator array; and

an outer device shell, wherein the carrier is disposed within the outer device shell, wherein a rear portion of the outer device shell is disposed on the opposite side of the carrier from the transparent substrate, wherein the rear portion of the outer device shell extends beyond the edges of the second surface of the carrier, and wherein the rigidity of the carrier is greater than the rigidity of the outer device shell.

2. The display device of claim 1, wherein the carrier comprises a material configured to inhibit vapor transmission into the package.

3. The display device of claim 1, wherein the carrier comprises an antenna.

4. A display device, comprising:

a carrier, said carrier comprising a first surface;

a transparent substrate, wherein a first surface of the transparent substrate is sealed to the first surface of the carrier to form a sealed package, and wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the substrate, such that a portion of the first surface of the carrier is laterally displaced offset from the transparent substrate;

an array of interferometric modulators disposed on said transparent substrate and sealed within said package; and

a keyboard disposed on said laterally displaced portion of said first surface of the carrier.

5. The display device of claim 4, wherein the display device comprises a telephone.

6. The display device of claim 4, wherein the carrier comprises a vapor transmission barrier.

7. The display device of claim 4, wherein the carrier comprises an antenna.

8. The display device of claim 4, wherein the laterally displaced portion of the first surface of the carrier is located outside of the sealed package.

9. A display device, comprising:

an array of interferometric modulators disposed on a first surface of a transparent substrate;

a carrier, wherein a first surface of said carrier is sealed to said first surface of the transparent substrate to form a package encapsulating the interferometric modulator array, wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the transparent substrate;

an ancillary device component, wherein said ancillary device component is disposed on a second surface of said carrier, and wherein the carrier comprises electrical feedthroughs extending through the carrier; and

a keyboard supported by the first surface of the carrier.

10. The display device of claim 9, wherein the ancillary device component comprises driver circuitry.

11. A display device, comprising:

an array of interferometric modulators disposed on a first surface of a transparent substrate;

a carrier, wherein a first surface of said carrier is sealed to said first surface of the transparent substrate to form a package encapsulating the interferometric modulator array, wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the transparent substrate;

an ancillary device component, wherein said ancilarry device component is disposed on a second surface of said carrier, and wherein the carrier comprises electrical feedthroughs extending through the carrier; and

a microphone supported by the first surface of the carrier.

12. The display device of claim 11, wherein the ancillary device component comprises driver circuitry.