Multiaxial acceleration sensor and angular velocity sensor
First Claim
1. A triaxial accelerometer comprising:
- a weight to which an acceleration is applied;
a base having a hollow space which allows the weight to move;
a plurality pairs of piezoelectric bimorph detectors having one ends connected to the base and other ends connected to the weight so as to support the weight movably with respect to the acceleration, which are arranged in a plane having first and second axes perpendicularly crossed on the weight, the plurality pairs of piezoelectric bimorph detectors includingfirst pair of piezoelectric bimorph detectors arranged symmetrically with respect to the first axis,second pair of piezoelectric bimorph detectors arranged symmetrically with respect to the second axis, andthird and fourth pairs of the piezoelectric bimorph detectors arranged symmetrically with respect to the first and second axes,wherein each of the piezoelectric bimorph detectors is so shaped as to have first and second straight portions linearly extended from the one end and the other end, respectively, and bent portions coupling the first and second straight portions and extended in a bent shape from the straight portions, andeach of the piezoelectric bimorph detectors has a deformable laminated structure having first, second and third electrodes and first and second piezoelectric films which are disposed between the first and second electrodes, and the second and third electrodes, respectively, the first, second and third electrodes generating voltages depending on a deformation of the laminated structure which is produced due to the acceleration applied to the weight; and
a detection circuit which detects each of three dimensional components of the acceleration from the voltages.
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Accused Products
Abstract
In a angular rate sensor, a weight and a base are connected directly through piezoelectric bimorph detectors and piezoelectric bimorph exciters each having a bent portion. When acceleration is applied to the weight, the weight is displaced so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect acceleration. If an angular rate is applied to the weight when the weight is vibrated by the piezoelectric bimorph exciters, Coriolis force is generated in the weight so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect the angular rate.
37 Citations
10 Claims
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1. A triaxial accelerometer comprising:
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a weight to which an acceleration is applied; a base having a hollow space which allows the weight to move; a plurality pairs of piezoelectric bimorph detectors having one ends connected to the base and other ends connected to the weight so as to support the weight movably with respect to the acceleration, which are arranged in a plane having first and second axes perpendicularly crossed on the weight, the plurality pairs of piezoelectric bimorph detectors including first pair of piezoelectric bimorph detectors arranged symmetrically with respect to the first axis, second pair of piezoelectric bimorph detectors arranged symmetrically with respect to the second axis, and third and fourth pairs of the piezoelectric bimorph detectors arranged symmetrically with respect to the first and second axes, wherein each of the piezoelectric bimorph detectors is so shaped as to have first and second straight portions linearly extended from the one end and the other end, respectively, and bent portions coupling the first and second straight portions and extended in a bent shape from the straight portions, and each of the piezoelectric bimorph detectors has a deformable laminated structure having first, second and third electrodes and first and second piezoelectric films which are disposed between the first and second electrodes, and the second and third electrodes, respectively, the first, second and third electrodes generating voltages depending on a deformation of the laminated structure which is produced due to the acceleration applied to the weight; and a detection circuit which detects each of three dimensional components of the acceleration from the voltages. - View Dependent Claims (2, 3, 4)
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5. A biaxial angular rate sensor comprising:
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a weight to which one or both of an acceleration and a Coriolis force are applied; a base having a hollow space which allows the weight to move; first and second pairs of piezoelectric bimorph detectors having one ends connected to the base and other ends connected to the weight so as to support the weight movably with respect to the acceleration and/or the Coriolis force, which are arranged in a plane having first and second axes perpendicularly crossed on the weight, wherein the first pair of piezoelectric bimorph detectors are arranged symmetrically with respect to the first axis, the second pair of piezoelectric bimorph detectors are arranged symmetrically with respect to the second axis, and each of the piezoelectric bimorph detectors is so shaped as to have first and second straight portions linearly extended from the one end and the other end, respectively, and first bent portions coupling the first and second straight portions and extended in a bent shape from the first and second straight portions; third and fourth pairs of piezoelectric bimorph exciters having one ends connected to the base and other ends connected to the weight so as to support the weight, wherein the piezoelectric bimorph exciters are arranged in the plane having the first and second axes, the third pair of piezoelectric bimorph exciters are arranged symmetrically with respect to the first axis, the fourth pair of piezoelectric bimorph exciters are arranged symmetrically with respect to the second axis, and each of the piezoelectric bimorph exciters is so shaped as to have third and fourth straight portions linearly extended from the one end and the other end, respectively, and second bent portions coupling the third and fourth straight portions and extended in a bent shape from the third and fourth straight portions; wherein each of the piezoelectric bimorph detectors and the piezoelectric bimorph exciters has a deformable laminated structure having first, second and third electrodes and first and second piezoelectric films which are disposed between the first and second electrodes, and the second and third electrodes, respectively, the first, second and third electrodes of the piezoelectric bimorph detectors generating voltages depending on a deformation of the laminated structure which is produced due to the acceleration applied to the weight, and each of the piezoelectric bimorph exciters is deformed due to an application of AC voltage so that each of the piezoelectric bimorph exciter vibrates the weight so as to generates the Coriolis force with the angular rate around the first and second axes of the weight; and a detection circuit which detects the acceleration and/or the angular rate acting around the first and second axes from the voltage. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification