Micro-electro-mechanical system device

• US 8,117,919 B2
• Filed: 08/04/2009
• Issued: 02/21/2012
• Est. Priority Date: 11/13/2008
• Status: Active Grant

• Current Assignee: PixArt Imaging Incorporated
• Original Assignee: Pixart Imaging Incorporation ROC
• Inventors: Lee, Sheng Ta, WANG, Chuan Wei
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US12/535,572
• Publication Number:
  US 20100116056A1
• Time in Patent Office: 931 Days
• Field of Search: 735/143.2, 735/143.8, 736/32, 737/14, 737/24, 438/53, 361/283.4, 367/181
• US Class Current: 73/632
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 2203/019 characterized by their profile
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182

Abstract

The present invention discloses a micro-electro-mechanical system (MEMS) device, comprising: a substrate with at least one opening; and a membrane supported on the substrate, the membrane including at least two thin segments and a thick segment connected together, wherein the two thin segments are not at the same level, and the thick segment is formed by a plurality of layers including at least two metal layers and a via layer, such that the membrane has a curve cross section.

Claims

1. A MEMS device, comprising:

a substrate with at least one opening; and

a membrane supported on the substrate, the membrane including at least two thin segments and a thick segment connected together, wherein the two thin segments are not at the same level, and the thick segment is formed by a plurality of layers including at least two metal layers and a via layer, such that the membrane has a curve cross section.

2. The MEMS device of claim 1, wherein the membrane and the substrate form a cavity therebetween.

3. The MEMS device of claim 2, wherein the membrane vibrates to cause a capacitance change.

4. The MEMS device of claim 2, wherein the thin segment is formed by a metal layer.

5. The MEMS device of claim 1, further comprising anchors supporting the membrane on the substrate, each anchor including an insulating layer, a contact layer on the insulating layer, a first metal layer on the contact layer, a via layer on the first metal layer, and a second metal layer on the via layer.

6. The MEMS device of claim 1, wherein the MEMS device is a micro-acoustical sensor.

7. The MEMS device of claim 1, wherein the membrane further includes at least one protrusion on its lower surface.

8. The MEMS device of claim 1, further comprising a suspended section which includes a part of the substrate and a conductive layer.

9. The MEMS device of claim 8, wherein the suspended section vibrates to cause a capacitance change.