Process of manufacturing luminescent device

• US 8,119,188 B2
• Filed: 06/05/2009
• Issued: 02/21/2012
• Est. Priority Date: 06/08/2001
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki
• Primary Examiner(s): Lin, James
• Application Number:
  US12/478,968
• Publication Number:
  US 20090274831A1
• Time in Patent Office: 991 Days
• Field of Search: 427/66, 427/422, 427/384
• US Class Current: 427/66
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 50/805 Electrodes
• CPC Class Codes: H10K 59/805 Electrodes
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/12 using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/13 using printing techniques, e.g. ink-jet printing or screen printing
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/18 using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
• CPC Class Codes: H10K 85/10 Organic polymers or oligomers
• CPC Class Codes: H10K 85/111 comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
• CPC Class Codes: H10K 85/113 Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
• CPC Class Codes: H10K 85/114 Poly-phenylenevinylene; Derivatives thereof
• CPC Class Codes: H10K 85/115 Polyfluorene; Derivatives thereof
• CPC Class Codes: H10K 85/341 Transition metal complexes, e.g. Ru(II)polypyridine complexes H10K85/331 takes precedence
• CPC Class Codes: H10K 85/60 Organic compounds having low molecular weight H10K85/10 - H10K85/50 take precedence

Abstract

A method of forming a film consisted of an organic compound material at low cost using an organic compound material having the high luminescence efficiency is provided. The present invention is characterized by the fact that a layer containing an organic compound is formed on the substrate under the inactive gas atmosphere by spreading the colloidal solution (referred to as sol) in which an aggregate of organic compound is dispersed. Noted that in the present invention, an organic compound may be particulate that several pieces of organic compound is aggregated in the liquid, or may be an organic compound partially dissolved in the liquid. Moreover, according to the present invention, a metal thin film is formed using the colloidal solution in which a metal material having a small work function is dispersed on the layer containing an organic compound by a coat method and made it a cathode or one portion of a cathode.

Claims

1. A method for manufacturing an electroluminescent device comprising:

setting a substrate in a chamber;

forming an anode over the substrate;

forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a first composition which flows from a nozzle; and

forming a cathode over the electroluminescence layer,

wherein the plurality of droplets of the first composition are discharged so that the plurality of droplets of the first composition are spread from the nozzle in different directions at one time,

wherein a fixed skirt is provided inside of and in contact with the chamber and the fixed skirt is provided around the nozzle,

wherein a heated nitrogen gas is discharged into an inner side of the fixed skirt to hit the plurality of droplets of the first composition,

wherein the plurality of droplets of the first composition comprises an organic compound, and

wherein the substrate is heated by a heater provided on a substrate stage.

2. The method for manufacturing the electroluminescent device according to claim 1, wherein the substrate is a glass substrate.

3. The method for manufacturing the electroluminescent device according to claim 1, wherein the plurality of droplets of the first composition comprises at least one selected from alcohols, toluene and water.

4. The method for manufacturing the electroluminescent device according to claim 1, wherein a switching element is provided on the substrate.

5. The method for manufacturing the electroluminescent device according to claim 1, wherein a solvent of the plurality of droplets of the first composition is evaporated by heating when the plurality of droplets of the first composition are discharged from the nozzle.

6. The method for manufacturing the electroluminescent device according to claim 1, wherein the chamber includes an evacuation means.

7. The method for manufacturing the electroluminescent device according to claim 1, wherein a thickness of the electroluminescence layer is in the range from 1 nm to 1 μ

m.

8. The method for manufacturing the electroluminescent device according to claim 1, wherein the fixed skirt is provided so as not to be in contact with an ejection outlet of the heated nitrogen gas.

9. A method for manufacturing an electroluminescent device comprising:

setting a substrate in a chamber;

forming an anode over the substrate;

forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a first composition which flows from a nozzle; and

forming a cathode over the electroluminescence layer,

wherein a first mask is set between the nozzle and the substrate and the electroluminescence layer is formed by making the plurality of droplets of the first composition pass through an opening portion of the first mask,

wherein the plurality of droplets of the first composition are discharged so that the plurality of droplets of the first composition are spread from the nozzle in different directions at one time,

wherein a fixed skirt is provided inside of and in contact with the chamber and the fixed skirt is provided around the nozzle,

wherein a heated nitrogen gas is discharged into an inner side of the fixed skirt to hit the plurality of droplets of the first composition,

wherein the plurality of droplets of the first composition comprises an organic compound, and

wherein the substrate is heated by a heater provided on a substrate stage.

10. The method for manufacturing the electroluminescent device according to claim 9, wherein the substrate is a glass substrate.

11. The method for manufacturing the electroluminescent device according to claim 9, wherein the plurality of droplets of the first composition comprises at least one selected from alcohols, toluene and water.

12. The method for manufacturing the electroluminescent device according to claim 9, wherein a switching element is provided on the substrate.

13. The method for manufacturing the electroluminescent device according to claim 9, wherein a solvent of the plurality of droplets of the first composition is evaporated by heating when the plurality of droplets of the first composition are discharged from the nozzle.

14. The method for manufacturing the electroluminescent device according to claim 9, wherein the chamber includes an evacuation means.

15. The method for manufacturing the electroluminescent device according to claim 9, wherein a thickness of the electroluminescence layer is in the range from 1 nm to 1 μ

m.

16. The method for manufacturing the electroluminescent device according to claim 9, wherein the fixed skirt is provided so as not to be in contact with an ejection outlet of the heated nitrogen gas.

17. A method for manufacturing an electroluminescent device comprising:

setting a substrate in a chamber;

forming an anode over the substrate;

forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a first composition which flows from a nozzle; and

forming a cathode over the electroluminescence layer,

wherein the plurality of droplets of the first composition is liquid having fluidity, and organic compound aggregates are dispersed as colloidal particulates in the liquid,

wherein the plurality of droplets of the first composition are discharged so that the plurality of droplets of the first composition are spread from the nozzle in different directions at one time,

wherein a fixed skirt is provided inside of and in contact with the chamber and the fixed skirt is provided around the nozzle,

wherein a heated nitrogen gas is discharged into an inner side of the fixed skirt to hit the plurality of droplets of the first composition,

wherein the plurality of droplets of the first composition comprises an organic compound, and

wherein the substrate is heated by a heater provided on a substrate stage.

18. The method for manufacturing the electroluminescent device according to claim 17, wherein the substrate is a glass substrate.

19. The method for manufacturing the electroluminescent device according to claim 17, wherein the plurality of droplets of the first composition comprises at least one selected from alcohols, toluene and water.

20. The method for manufacturing the electroluminescent device according to claim 17, wherein a switching element is provided on the substrate.

21. The method for manufacturing the electroluminescent device according to claim 17, wherein a solvent of the plurality of droplets of the first composition is evaporated by heating when the plurality of droplets of the first composition are discharged from the nozzle.

22. The method for manufacturing the electroluminescent device according to claim 17, wherein the chamber includes an evacuation means.

23. The method for manufacturing the electroluminescent device according to claim 17, wherein a thickness of the electroluminescence layer is in the range from 1 nm to 1 μ

m.

24. The method for manufacturing the electroluminescent device according to claim 17, wherein a material of the organic compound aggregates is one or more kinds selected from quinacridone, tris (2-phenylpyridine) iridium and bathocuproine.

25. The method for manufacturing the electroluminescent device according to claim 17, wherein a material of the organic compound aggregates is one or more kinds selected from poly (1,4-phenylenevinylene), poly (1,4-naphthalenevinylene), poly (2-phenyl-1,4-phenylenevinylene), polythiophene, poly (3-phenylthiophene), poly (1,4-phenylene) and poly (2,7-fluorene).

26. The method for manufacturing the electroluminescent device according to claim 17, wherein the fixed skirt is provided so as not to be in contact with an ejection outlet of the heated nitrogen gas.

27. A method for manufacturing an electroluminescent device comprising:

setting a substrate in a chamber;

forming an anode over the substrate;

forming an electroluminescence layer over the anode by repeatedly spreading a plurality of droplets of a first composition which flows from a nozzle; and

forming a cathode over the electroluminescence layer,

wherein a first mask is set between the nozzle and the substrate and the electroluminescence layer is formed by making the plurality of droplets of the first composition pass through an opening portion of the first mask,

wherein the plurality of droplets of the first composition is liquid having fluidity, and organic compound aggregates are dispersed as colloidal particulates in the liquid,

wherein the plurality of droplets of the first composition are discharged so that the plurality of droplets of the first composition are spread from the nozzle in different directions at one time,

wherein a fixed skirt is provided inside of and in contact with the chamber and the fixed skirt is provided around the nozzle,

wherein a heated nitrogen gas is discharged into an inner side of the fixed skirt to hit the plurality of droplets of the first composition,

wherein the plurality of droplets of the first composition comprises an organic compound, and

wherein the substrate is heated by a heater provided on a substrate stage.

28. The method for manufacturing the electroluminescent device according to claim 27, wherein the substrate is a glass substrate.

29. The method for manufacturing the electroluminescent device according to claim 27, wherein the plurality of droplets of the first composition comprises at least one selected from alcohols, toluene and water.

30. The method for manufacturing the electroluminescent device according to claim 27, wherein a switching element is provided on the substrate.

31. The method for manufacturing the electroluminescent device according to claim 27, wherein a solvent of the plurality of droplets of the first composition is evaporated by heating when the plurality of droplets of the first composition are discharged from the nozzle.

32. The method for manufacturing the electroluminescent device according to claim 27, wherein the chamber includes an evacuation means.

33. The method for manufacturing the electroluminescent device according to claim 27, wherein a thickness of the electroluminescence layer is in the range from 1 nm to 1 μ

m.

34. The method for manufacturing the electroluminescent device according to claim 27, wherein a material of the organic compound aggregates is one or more kinds selected from quinacridone, tris (2-phenylpyridine) iridium and bathocuproine.

35. The method for manufacturing the electroluminescent device according to claim 27, wherein a material of the organic compound aggregates is one or more kinds selected from poly (1,4-phenylenevinylene), poly (1,4-naphthalenevinylene), poly (2-phenyl-1,4-phenylenevinylene), polythiophene, poly (3-phenylthiophene), poly (1,4-phenylene) and poly (2,7-fluorene).

36. The method for manufacturing the electroluminescent device according to claim 27, wherein the fixed skirt is provided so as not to be in contact with an ejection outlet of the heated nitrogen gas.