Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
First Claim
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1. An imaging device, comprising:
- a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames of an object;
at least one A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames;
a plurality of digital registers which temporarily store the digital image data;
a digital memory which stores image data;
a plurality of digital adders which add values of the digital image data held in the digital registers and corresponding to each of the plurality of successive overlapping image frames to image data stored in the digital memory, thus forming a single composite image frame of the object obtained from the successive overlapping image frames.
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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Citations
4 Claims
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1. An imaging device, comprising:
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a two-dimensional array of sensor elements which generates image data corresponding to a plurality of successive overlapping image frames of an object; at least one A/D converter which converts the image data into digital image data corresponding to the plurality of successive overlapping image frames; a plurality of digital registers which temporarily store the digital image data; a digital memory which stores image data; a plurality of digital adders which add values of the digital image data held in the digital registers and corresponding to each of the plurality of successive overlapping image frames to image data stored in the digital memory, thus forming a single composite image frame of the object obtained from the successive overlapping image frames. - View Dependent Claims (2, 3)
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4. An imaging method comprising:
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generating image data corresponding to a plurality of successive overlapping image frames of an object; converting the image data into digital image data corresponding to the plurality of successive overlapping image frames; temporarily storing the digital image data; adding values of the temporarily-stored digital image corresponding to each of the plurality of successive overlapping image frames to image data stored in a digital memory, thus forming a single composite image frame of the object obtained from the successive overlapping image frames.
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Specification