×

Display device including an opening formed in a gate insulating film, a passivation film, and a barrier film

  • US 8,120,031 B2
  • Filed: 07/31/2007
  • Issued: 02/21/2012
  • Est. Priority Date: 05/17/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. A display device comprising:

  • a semiconductor film;

    a gate insulating film over the semiconductor film;

    a first metal layer over the gate insulating film;

    a first passivation film over the first metal layer;

    a second metal layer over the first passivation film;

    a flattening film over the second metal layer;

    a barrier film over the flattening film; and

    a third metal layer over the barrier film,wherein a side face of a first opening formed in the flattening film is covered by the barrier film,wherein the barrier film and the first passivation film are in contact with each other at a base of the first opening,wherein a second opening is formed in the gate insulating film, the first passivation film, and the barrier film at the base of the first opening,wherein the second opening is formed inside the first openingwherein the third metal layer is connected to the semiconductor film via the first opening and the second opening,wherein a first capacitor element comprises the semiconductor film, the gate insulating film, and the first metal layer, andwherein a second capacitor element comprises the first metal layer, the first passivation film, the barrier film, and the third metal layer.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×