Coupling apparatus, exposure apparatus, and device fabricating method
First Claim
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1. An exposure apparatus comprising:
- a projection optical system that has a first group including an optical member that contacts a liquid, and a second group that differs from the first group;
a substrate stage that is movable with respect to the optical member while the optical member contacts the liquid;
a support mechanism that supports the first group and the second group so that the first group and the second group are substantially isolated from each other; and
a drive mechanism that adjusts a position of the first group so that a predetermined relationship between the first group and the second group is maintained, the position of the first group being changed due to a pressure change in the liquid.
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Abstract
An exposure apparatus fills a space between a projection optical system and a substrate with a liquid and projects a pattern image onto the substrate to expose the substrate. The projection optical system has a first group including an optical member that comes into contact with the liquid, and a second group that differs from the first group. The first group is supported by a first support member via a vibration isolating apparatus.
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Citations
50 Claims
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1. An exposure apparatus comprising:
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a projection optical system that has a first group including an optical member that contacts a liquid, and a second group that differs from the first group; a substrate stage that is movable with respect to the optical member while the optical member contacts the liquid; a support mechanism that supports the first group and the second group so that the first group and the second group are substantially isolated from each other; and a drive mechanism that adjusts a position of the first group so that a predetermined relationship between the first group and the second group is maintained, the position of the first group being changed due to a pressure change in the liquid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An exposure apparatus comprising:
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an optical member that contacts a liquid; a projection optical system body; a first support member that supports the optical member; a second support member that supports the projection optical system body; a frame member that supports the second support member; a linking device that is disposed between the first support member and the frame member and links the first support member and the frame member; and a drive mechanism that adjusts a position of the optical member to maintain a predetermined state of a positional relationship between the projection optical system body and the optical member, the position of the optical member being changed due to a pressure change in the liquid. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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Specification