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Device and method for the optical measurement of an optical system by using an immersion fluid

  • US 8,120,763 B2
  • Filed: 06/23/2009
  • Issued: 02/21/2012
  • Est. Priority Date: 12/20/2002
  • Status: Expired due to Term
First Claim
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1. A projection optical system inspecting method that inspects the optical performance of a projection optical system used for immersion exposure, the method comprising:

  • providing an optical member in an image plane side of the projection optical system;

    providing a detector;

    supplying a liquid to the image plane side of the projection optical system; and

    photoelectrically detecting a measuring beam that passes through the projection optical system, the liquid and the optical member with a CCD array.

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