×

System of fabricating a flexible electrode array

  • US 8,122,596 B2
  • Filed: 05/25/2010
  • Issued: 02/28/2012
  • Est. Priority Date: 11/16/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. A system of fabricating a flexible electrode array for connection to retina tissue having a shape, comprising the steps of:

  • spin-coating a poly(dimethylsiloxane) layer (PDMS) onto a handle wafer that has been pre-coated with a conductive seed layer, wherein said poly(dimethylsiloxane) layer (PDMS) is spin-coated to form a shape that will conform to the shape of the retina tissue;

    patterning said poly(dimethylsiloxane) layer (PDMS) to expose said conductive seed layer to form electrodes, wherein said electrodes have a shape that will allow said electrodes to contact and make connection to the retina tissue;

    plating said electrodes until said electrodes are higher than the thickness of said poly(dimethylsiloxane) layer (PDMS) and until said electrodes form mushroom caps which later will prevent said electrodes from popping out of said poly(dimethylsiloxane) layer (PDMS) when said poly(dimethylsiloxane) layer (PDMS) is removed from said handle wafer;

    patterning conducing lines on said poly(dimethylsiloxane) layer (PDMS), andimplementing final processing steps for fabricating a flexible electrode array for connection to the retina tissue having a shape.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×