×

Microfabricated elastomeric valve and pump systems

  • US 8,124,218 B2
  • Filed: 09/09/2009
  • Issued: 02/28/2012
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Fees
First Claim
Patent Images

1. A composite structure comprising:

  • an elastomer component with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa including a recess and a flexible membrane portion;

    a substantially planar nonelastomer component sealed against the elastomer component; and

    an active device disposed within the nonelastomer component, wherein the active device is configured to interact with at least the membrane portion or a material present in the recess.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×