Microfabricated elastomeric valve and pump systems
First Claim
1. A composite structure comprising:
- an elastomer component with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa including a recess and a flexible membrane portion;
a substantially planar nonelastomer component sealed against the elastomer component; and
an active device disposed within the nonelastomer component, wherein the active device is configured to interact with at least the membrane portion or a material present in the recess.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
182 Citations
5 Claims
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1. A composite structure comprising:
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an elastomer component with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa including a recess and a flexible membrane portion; a substantially planar nonelastomer component sealed against the elastomer component; and an active device disposed within the nonelastomer component, wherein the active device is configured to interact with at least the membrane portion or a material present in the recess. - View Dependent Claims (2, 3, 4, 5)
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Specification