Load lock chamber with decoupled slit valve door seal compartment
First Claim
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1. A load lock chamber, comprising:
- a main assembly having a substrate transfer cavity and two substrate access ports formed through the main assembly, the two substrate access ports fluidly coupled to the cavity;
a first slit valve door seal compartment having an aperture adjacent and aligned with one of the access ports, the first slit valve door seal compartment decoupled from the main assembly; and
a seal assembly coupling the first slit valve door seal compartment to the main assembly.
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Abstract
Embodiments of the invention include a load lock chamber having a decoupled slit valve door seal compartment. In one embodiment, a load lock chamber includes a main assembly, a first slit valve door seal compartment and a seal assembly. The main assembly has a substrate transfer cavity formed therein. Two substrate access ports are formed through the main assembly and fluidly couple to the cavity. The first slit valve door seal compartment has an aperture disposed adjacent to and aligned with one of the access ports. The first slit valve door seal compartment is decoupled from the main assembly. The seal assembly couples the first slit valve door seal compartment to the main assembly.
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Citations
20 Claims
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1. A load lock chamber, comprising:
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a main assembly having a substrate transfer cavity and two substrate access ports formed through the main assembly, the two substrate access ports fluidly coupled to the cavity; a first slit valve door seal compartment having an aperture adjacent and aligned with one of the access ports, the first slit valve door seal compartment decoupled from the main assembly; and a seal assembly coupling the first slit valve door seal compartment to the main assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A load lock chamber, comprising:
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a main assembly having a substrate transfer cavity, a first substrate access port and a second substrate access port formed through the main assembly, the substrate access ports fluidly coupled to the cavity; a first slit valve door seal compartment having a substrate transfer passage, the substrate transfer passage having a port adjacent and aligned with the first access port, the first slit valve door seal compartment decoupled from the main assembly; a slit valve door engaging a sealing face of the first slit door seal compartment to selectively seal the first substrate transfer passage and first substrate access port; and an annular resilient seal forming a seal between the first slit valve door seal compartment and the main assembly. - View Dependent Claims (18, 19)
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20. A load lock chamber, comprising:
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a main assembly having a substrate transfer cavity and at least six substrate access ports formed through the main assembly, the substrate access ports fluidly coupled to the cavity; a first slit valve door seal compartment having a first substrate transfer passage, a second substrate transfer passage and a third substrate transfer passage, the substrate transfer passages of the first slit valve door seal compartment aligned with respective first, second and third substrate access ports of the main assembly, the first slit valve door seal compartment disposed in a spaced-apart relation to the main assembly; a first slit valve door disposed in the first slit door seal compartment, the first slit valve door selectively engaging a sealing face of the first slit door seal compartment to selectively seal the first substrate transfer passage; a second slit valve door disposed in the first slit door seal compartment, the second slit valve door selectively engaging a sealing face of the first slit door seal compartment to selectively seal the second substrate transfer passage; a third slit valve door disposed in the first slit door seal compartment, the third slit valve door selectively engaging a sealing face of the first slit door seal compartment to selectively seal the third substrate transfer passage; a first cylindrical resilient seal forming a seal between the first slit valve door seal compartment and the main assembly; a second slit valve door seal compartment having a first substrate transfer passage, a second substrate transfer passage and a third substrate transfer passage, the substrate transfer passages of the second slit valve door seal compartment aligned with respective fourth, fifth and sixth substrate access ports of the main assembly, the second slit valve door seal compartment disposed in a spaced-apart relation to the main assembly; a fourth slit valve door disposed in the second slit valve door seal compartment, the fourth slit valve door selectively engaging a sealing face of the second slit valve door seal compartment to selectively seal the fourth substrate transfer passage; a fifth slit valve door disposed in the second slit valve door seal compartment, the fifth slit valve door selectively engaging a sealing face of the second slit valve door seal compartment to selectively seal the fifth substrate transfer passage; a sixth slit valve door disposed in the second slit valve door seal compartment, the sixth slit valve door selectively engaging a sealing face of the second slit valve door seal compartment to selectively seal the sixth substrate transfer passage; and a second cylindrical resilient seal forming a seal between the second slit valve door seal compartment and the main assembly.
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Specification