Exposure apparatus and method for producing device
First Claim
Patent Images
1. A lithographic apparatus comprising:
- a substrate table which holds a substrate;
a projection system which projects a patterned beam onto a target portion of the substrate on the substrate table;
a liquid supply system which at least partly fills a space between the projection system and an object on the substrate table with a liquid; and
a drying station which removes the liquid from the substrate table or from both the substrate table and the object.
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Abstract
There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate P via the projection optical system and the liquid so as to expose the substrate P. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system.
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Citations
20 Claims
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1. A lithographic apparatus comprising:
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a substrate table which holds a substrate; a projection system which projects a patterned beam onto a target portion of the substrate on the substrate table; a liquid supply system which at least partly fills a space between the projection system and an object on the substrate table with a liquid; and a drying station which removes the liquid from the substrate table or from both the substrate table and the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 17, 19)
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11. A device manufacturing method comprising:
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providing a liquid between a projection system and an object on a substrate table; projecting a patterned beam of radiation, through the liquid, onto a target portion of a substrate on the substrate table using the projection system; and removing the liquid from the substrate table or from the substrate table and the object. - View Dependent Claims (12, 13, 14, 15, 16, 18, 20)
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Specification