MEMS device fabricated on a pre-patterned substrate
First Claim
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1. A method of making an electromechanical systems device, the method comprising:
- providing a substrate having a plurality of trenches in a top surface of the substrate; and
forming a moveable electrode layer over the top surface of the substrate and in the trenches, wherein the moveable electrode layer is discontinuous between inside the trenches and outside the trenches such that the moveable electrode layer outside the trenches forms a plurality of moveable electrodes separated from one another.
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
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Citations
17 Claims
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1. A method of making an electromechanical systems device, the method comprising:
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providing a substrate having a plurality of trenches in a top surface of the substrate; and forming a moveable electrode layer over the top surface of the substrate and in the trenches, wherein the moveable electrode layer is discontinuous between inside the trenches and outside the trenches such that the moveable electrode layer outside the trenches forms a plurality of moveable electrodes separated from one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of forming an electromechanical systems device, the method comprising:
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providing a substrate having a top surface, wherein a plurality of grooves is formed in the top surface; and forming a conductive layer over the substrate and inside the grooves such that the conductive layer is discontinuous at the grooves, forming strips of the conductive layer inside the grooves and strips of the conductive layer outside the grooves, wherein the strips of the conductive layer outside the grooves form conductive lines that are isolated from the strips of the conductive layer inside the grooves. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification