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Implantable micro-electromechanical system sensor

  • US 8,127,618 B1
  • Filed: 05/18/2007
  • Issued: 03/06/2012
  • Est. Priority Date: 05/18/2007
  • Status: Expired due to Fees
First Claim
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1. An implantable lead comprising:

  • a lead body;

    a sensor housing attached to the lead body, and defining an internal space, and comprising at least one outer wall defining an aperture;

    a micro-electromechanical system (MEMS) pressure sensor comprising a diaphragm, wherein;

    the pressure sensor is positioned within the internal space and adjoins the aperture of the sensor housing such that an outer surface of at least a portion of the diaphragm is exposed to the aperture; and

    the pressure sensor is sized and contained within the internal space such that during thermal expansion the pressure sensor is free to expand in at least one direction; and

    a biocompatible material attached to the outer surface.

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