Technique for the growth of planar semi-polar gallium nitride
First Claim
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1. A nitride film, comprising:
- a semi-polar nitride film grown on a semi-polar plane of a substrate, such that a surface of the semi-polar nitride film is planar and parallel to a surface of the semi-polar plane of the substrate.
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Abstract
A method for growing planar, semi-polar nitride film on a miscut spinel substrate, in which a large area of the planar, semi-polar nitride film is parallel to the substrate'"'"'s surface. The planar films and substrates are: (1) {10
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16 Claims
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1. A nitride film, comprising:
a semi-polar nitride film grown on a semi-polar plane of a substrate, such that a surface of the semi-polar nitride film is planar and parallel to a surface of the semi-polar plane of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for growing a nitride film, comprising:
growing a semi-polar nitride film on a semi-polar plane of a substrate, such that a surface of the semi-polar nitride film is planar and parallel to a surface of the semi-polar plane of the substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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