Semiconductor device
First Claim
Patent Images
1. A semiconductor device comprising:
- an insulating substrate;
a plurality of variable capacitors each including a pair of electrodes and a dielectric interposed therebetween,a read-out circuit that detects change of capacitance of each variable capacitor; and
a display device,wherein the capacitance of the plurality of variable capacitors are changed by pushing one of the pair of electrodes, andwherein the plurality of variable capacitors, the read-out circuit, and the display device are provided over the insulating substrate.
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Abstract
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.
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Citations
24 Claims
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1. A semiconductor device comprising:
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an insulating substrate; a plurality of variable capacitors each including a pair of electrodes and a dielectric interposed therebetween, a read-out circuit that detects change of capacitance of each variable capacitor; and a display device, wherein the capacitance of the plurality of variable capacitors are changed by pushing one of the pair of electrodes, and wherein the plurality of variable capacitors, the read-out circuit, and the display device are provided over the insulating substrate. - View Dependent Claims (2, 3, 4, 5, 6, 8, 9, 10, 11, 12)
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7. A semiconductor device comprising:
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an insulating substrate; a variable capacitor including a pair of electrodes and a dielectric, which is formed over the insulating substrate; and a display device over the insulating substrate, wherein a capacitance of the variable capacitor is changed by pushing one of the pair of electrodes, and wherein the semiconductor device includes a unit for converting change of the capacitance of the variable capacitor into an electrical signal.
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13. A semiconductor device comprising:
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an insulating substrate; a plurality of variable capacitors each including a pair of electrodes and a dielectric, which are formed over the insulating substrate; and a display device over the insulating substrate, wherein a capacitance of the plurality of variable capacitors are changed by pushing one of the pair of electrodes, and wherein the semiconductor device includes a unit for converting change of the capacitance of each variable capacitor into an electrical signal. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A semiconductor device comprising:
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an insulating substrate; a variable capacitor including a pair of electrodes and a dielectric interposed therebetween; a read-out circuit that detects change of capacitance of the variable capacitor; and a display device, wherein the capacitance of the variable capacitor is changed by pushing one of the pair of electrodes, and wherein the variable capacitor, the read-out circuit, and the display device are provided over the insulating substrate. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification