Film forming apparatus and method, gas supply device and storage medium

• US 8,133,323 B2
• Filed: 12/19/2008
• Issued: 03/13/2012
• Est. Priority Date: 06/20/2006
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kakegawa, Takashi
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US12/340,058
• Publication Number:
  US 20090104351A1
• Time in Patent Office: 1,180 Days
• Field of Search: 118/724, 118/715, 156/345.37, 156/345.33, 156/345.34
• US Class Current: 118/724
• CPC Class Codes: C23C 16/34 Nitrides C23C16/303 takes precedence
• CPC Class Codes: C23C 16/45523 Pulsed gas flow or change of composition over time
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: H01L 21/28562 Selective deposition
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/76841 Barrier, adhesion or liner layers

Abstract

A film forming apparatus is provided with a chamber which defines a processing space for performing a film forming process to a substrate a stage arranged in the chamber for mounting the substrate thereon; a substrate heating unit arranged on the stage for heating the substrate; a shower head which is arranged to face the stage and has many gas injecting holes; a gas supply unit for supplying cooling unit arranged above the shower head for cooling the shower head; and a shower head heating unit arranged above the cooling unit for heating the shower head through the cooling unit.

Claims

1. A film forming apparatus comprising:

a chamber which defines a processing space in which a film forming process is performed on a substrate;

a stage arranged in the chamber on which the substrate is mounted, the stage including a substrate heating unit that heats the substrate;

a shower head which is arranged to face the stage and has a plurality of gas injecting holes;

a gas supply unit that supplies a processing gas into the chamber through the shower head;

a cooling unit arranged above the shower head that cools the shower head; and

a shower head heating unit arranged above the cooling unit that heats the shower head through the cooling unit,

wherein the cooling unit includes a plurality of cooling fins and a cooling gas supply channel that supplies cooling gas to the corresponding cooling fins.

2. The film forming apparatus of claim 1, wherein each of the cooling fins is raised and has a horizontally elongated plate shape,

wherein the cooling fins are arranged in parallel, and

wherein the cooling gas supply channel has gas discharge holes which open to allow cooling gas to pass from one end to the other end of a horizontally extending gap between the cooling fins.

3. The film forming apparatus of claim 1, wherein the cooling unit and the shower head heating unit are accommodated in a housing having a gas exhaust port.

4. The film forming apparatus of claim 1, wherein the shower head includes a gas diffusion space communicating with the gas injecting holes, and

wherein a plurality of post portions that transfer heat between an upper side and a lower side of the shower head are disposed in the gas diffusion space.

5. The film forming apparatus of claim 1, further comprising:

a temperature detecting unit that detects a temperature of a bottom surface of the shower head;

and a control unit that controls the shower head heating unit based on a detected temperature value of the temperature detecting unit.

6. The film forming apparatus of claim 1, wherein the gas supply unit supplies a first and a second processing gas into the processing space simultaneously or separately in a plurality of cycles.

7. The film forming apparatus of claim 6, wherein the first processing gas is titanium compound gas, and the second processing gas is ammonia gas.

13. The film forming apparatus of claim 1, wherein the shower head heating unit generates heat.

14. The film forming apparatus of claim 1, wherein the shower head heating unit is a shower head heater.

15. The film forming apparatus of claim 1, wherein the shower head heating unit includes a first plate member that is disposed directly on the plurality of cooling fins.

16. The film forming apparatus of claim 1, wherein the shower head heating unit includes a first plate member and a second plate member, the first and second plate member sandwiching insulated rubber sheets, which rubber sheets have heating resistance disposed therebetween.

8. A gas supply device for use in a film forming apparatus including a chamber which defines a processing space for performing film forming process to a substrate and a stage arranged in the chamber for mounting the substrate thereon, the gas supply device comprising:

a shower head which is arranged to face the stage and has a plurality of gas injecting holes;

a cooling unit arranged above the shower head that cools the shower head; and

a shower head heating unit arranged above the cooling unit that heats the shower head through the cooling unit,

wherein the cooling unit includes a plurality of cooling fins and a cooling gas supply channel that supplies cooling gas to the corresponding cooling fins.

9. The gas supply unit of claim 8, wherein each of the cooling fins is raised and has a horizontally elongated plate shape,

wherein the cooling fins are arranged in parallel and

wherein the cooling gas supply channel has gas discharge holes which open to allow cooling gas to pass from one end to the other end of a horizontally extending gap between the cooling fins.

10. The gas supply device of claim 8, wherein the cooling unit and the shower head heating unit are accommodated in a housing having a gas exhaust port.

11. The gas supply device of claim 8, wherein the shower head includes a gas diffusion space communicating with the gas injecting holes, and

wherein a plurality of post portions that transfer heat between an upper side and a lower side of the shower head are disposed in the gas diffusion space.

12. The gas supply device of claim 8, further comprising:

a temperature detecting unit that detects a temperature of a bottom surface of the shower head; and

a control unit that controls the shower head heating unit based on a detected temperature value of the temperature detecting unit.

17. The gas supply device of claim 8, wherein the shower head heating unit generates heat.

18. The gas supply device of claim 8, wherein the shower head heating unit is a shower head heater.

19. The gas supply device of claim 8, wherein the shower head heating unit includes a first plate member that is disposed directly on the plurality of cooling fins.

20. The gas supply device of claim 8, wherein the shower head heating unit includes a first plate member and a second plate member, the first and second plate member sandwiching insulated rubber sheets, which rubber sheets have heating resistance disposed therebetween.