EL display device and method of manufacturing the same

• US 8,133,748 B2
• Filed: 07/10/2009
• Issued: 03/13/2012
• Est. Priority Date: 10/12/1999
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Yamamoto, Kunitaka, Hiroki, Masaaki, Fukunaga, Takeshi
• Primary Examiner(s): MENZ, LAURA MARY
• Application Number:
  US12/500,862
• Publication Number:
  US 20090269871A1
• Time in Patent Office: 977 Days
• Field of Search: 438 28- 29, 438/758
• US Class Current: 438/28
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/846 comprising getter material or desiccants
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 71/12 using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/135 using ink-jet printing
• CPC Class Codes: H10K 71/851 Division of substrate

Abstract

To provide a high throughput film deposition means for film depositing an organic EL material made of polymer accurately and without any positional shift. A pixel portion is divided into a plurality of pixel rows by a bank, and a head portion of a thin film deposition apparatus is scanned along a pixel row to thereby simultaneously apply a red light emitting layer application liquid, a green light emitting layer application liquid, and a blue light emitting layer application liquid in stripe shapes. Heat treatment is then performed to thereby form light emitting layers luminescing each of the colors red, green, and blue.

Claims

1. A method of manufacturing a light emitting device comprising:

forming a plurality of stripe shape banks over a substrate to form a plurality of grooves including a first groove and a second groove wherein a plurality of electrodes are arranged along each of the plurality of grooves;

continuously discharging a first liquid from a first nozzle into the first groove and a second liquid from a second nozzle into the second groove while relatively moving the first nozzle and the second nozzle along the first groove and the second groove, the first liquid including a first organic light emitting material and the second liquid including a second organic light emitting material, thereby, forming a first layer containing the first liquid continuously over the plurality of electrodes in the first groove, and a second layer containing the second liquid continuously over the plurality of electrodes in the second groove.

2. The method according to claim 1 wherein the substrate is moved while the first nozzle and the second nozzle are fixed in the step of continuously discharging the first liquid and the second liquid.

3. The method according to claim 1 further comprising a step of heating the first liquid and the second liquid to form a first layer including the first organic light emitting material and a second layer including the second organic light emitting material.

4. The method according to claim 1 wherein the first groove is located adjacent to the second groove.

5. The method according to claim 1 wherein the first organic light emitting material emits a different color light from the second organic light emitting material.

6. The method according to claim 1 further comprising a step of forming a layer including a third organic light emitting material over the first groove and the second groove.

15. The method according to claim 1 wherein the light emitting device is a an active matrix display device.

17. The method according to claim 1 wherein the light emitting device is a an display device.

7. A method of manufacturing a light emitting device comprising:

forming a plurality of stripe shape banks over a substrate to form a plurality of grooves including a first groove and a second groove wherein at least two electrodes are arranged along the first groove and at least two electrodes are arranged along the second groove;

continuously discharging a first liquid from a first nozzle into the first groove while relatively moving the first nozzle along the first groove, the first liquid including a first organic light emitting material, thereby, forming a first layer containing the first liquid continuously over at least the two electrodes in the first groove; and

continuously discharging a second liquid from a second nozzle into the second groove while relatively moving the second nozzle along the second groove, the second liquid including a second organic light emitting material, thereby, forming a second layer containing the second liquid continuously over at least the two electrodes in the second groove.

8. The method according to claim 7 wherein the substrate is moved while the first nozzle is fixed in the step of continuously discharging the first liquid.

9. The method according to claim 7 wherein the substrate is moved while the second nozzle is fixed in the step of continuously discharging the second liquid.

10. The method according to claim 7 further comprising a step of heating the first liquid and the second liquid to form a first layer including the first organic light emitting material and a second layer including the second organic light emitting material.

11. The method according to claim 7 wherein the first groove is located adjacent to the second groove.

12. The method according to claim 7 wherein the first organic light emitting material emits a different color light from the second organic light emitting material.

13. The method according to claim 7 further comprising a step of forming a layer including a third organic light emitting material over the first groove and the second groove.

14. The method according to claim 7 wherein the first liquid and the second liquid are discharged in a same step.

16. The method according to claim 7 wherein the light emitting device is a an active matrix display device.

18. The method according to claim 7 wherein the light emitting device is a an display device.