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Substrate for transparent electrodes

  • US 8,133,807 B2
  • Filed: 05/01/2008
  • Issued: 03/13/2012
  • Est. Priority Date: 02/26/2002
  • Status: Expired due to Fees
First Claim
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1. A method of producing a substrate for a transparent electrode comprising:

  • forming an indium tin oxide film on a transparent substrate at 280°

    C. or higher by means of a spray pyrolysis deposition method; and

    subsequently forming a fluorine doped tin oxide film on the indium tin oxide film by means of a spray pyrolysis deposition method, wherein a raw material compound solution used for forming the fluorine doped tin oxide film is sprayed within 1 to 3 minutes of completing the formation of the indium tin oxide film.

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