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Electrostatic comb actuator

  • US 8,134,277 B2
  • Filed: 12/15/2009
  • Issued: 03/13/2012
  • Est. Priority Date: 12/15/2009
  • Status: Active Grant
First Claim
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1. An electrostatic comb actuator comprising:

  • a substrate;

    a stator electrode including a stator finger extending from the substrate; and

    a rotor electrode pivotally mounted over the substrate for rotation about a first axis parallel to the substrate upon applying a voltage between the rotor and the stator electrodes, the rotor electrode includingan anchor wall running parallel to the first axis at a first distance therefrom, anda rotor finger extending from the anchor wall toward the first axis for a second distance smaller than the first distance,wherein the stator finger is disposed closer to the first axis than the anchor wall, to enable the rotor finger to rotate about the first axis without the stator finger contacting the anchor wall.

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