Carbon nanotube-based gas valve

• US 8,136,551 B2
• Filed: 08/29/2008
• Issued: 03/20/2012
• Est. Priority Date: 08/29/2008
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Pushparaj, Victor L., Nalamasu, Omkaram
• Primary Examiner(s): FOX, JOHN C
• Application Number:
  US12/201,282
• Publication Number:
  US 20100051843A1
• Time in Patent Office: 1,299 Days
• Field of Search: 137/625.28, 137/625.33, 251 4- 10
• US Class Current: 137/625.28
• CPC Class Codes: F16K 13/00 Other constructional types of cut-off apparatus means for plugging pipes or hoses F16L55/10; Arrangements for cutting-off
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: Y10T 137/86718 Dividing into parallel flow paths with recombining

Abstract

Precise control over gas delivery is achieved at the micro and nanobar mass levels by incorporating blocks of aligned carbon nanotubes into valves and finely adjusting the flow through the block by controlling a compressing force applied to the block. A valve for controlling gas flow includes: a valve housing; a block of aligned carbon nanotubes, the block and the valve housing being configured to direct the gas through the carbon nanotubes in the block; and a device configured to apply a force to the block in order to compress the block, wherein the block is compressed perpendicular to the walls of the carbon nanotubes in the block; whereby the application of the force to the walls restricts the flow of the gas through the valve. The valve may further comprise an electrical device for monitoring the electrical properties of the carbon nanotube block. This monitoring provides information on the state of compression of the carbon nanotube block and/or the gas that is flowing through the valve.

Claims

1. A valve for controlling flow of a gas, comprising:

a valve housing;

a block of aligned carbon nanotubes, said block and said valve housing being configured to direct said gas through the carbon nanotubes in said block; and

a device for applying a force to compress said block of aligned carbon nanotubes, wherein said block of aligned carbon nanotubes is compressed perpendicular to the walls of the carbon nanotubes in said block;

whereby the application of said force to said walls restricts the flow of said gas through said valve.

2. The valve of claim 1, wherein said device comprises:

parallel planar electrodes attached to said block, said electrodes being parallel to the long axes of the carbon nanotubes in said block; and

a voltage supply electrically connected to said parallel plates, said voltage supply being configured to apply a potential difference across said block, wherein said block is compressed perpendicular to the walls of the carbon nanotubes in said block on the application of said potential difference across said block.

3. The valve of claim 2, wherein said voltage supply is a pulse signal generator.

4. The valve of claim 2, wherein said voltage supply is a direct current supply.

5. The valve of claim 2, further comprising an electrical device for monitoring the electrical properties of said block.

6. The valve of claim 2, wherein said block is infiltrated with piezoelectric polymer.

7. The valve of claim 1, wherein said block is comprised of single walled carbon nanotubes.

8. The valve of claim 1, wherein said block is comprised of multi-walled carbon nanotubes.

9. The valve of claim 1, wherein said block is sealed to said valve housing using a vacuum-compatible adhesive material.

10. The valve of claim 1, wherein said device comprises:

parallel planar walls attached to said block, said walls being parallel to the long axes of the carbon nanotubes in said block; and

a mechanical device, configured to apply a force to at least one of said walls, wherein said block is compressed perpendicular to the walls on the application of said force to said walls.

11. The valve of claim 10, wherein said mechanical device is a screw configured to apply a force to the outer surface of one of said walls.

12. The valve of claim 10, wherein said mechanical device is an actuator configured to apply a force to the outer surface of one of said walls.

13. The valve of claim 10, further comprising:

an electrical device for monitoring the electrical properties of said block, said electrical device being electrically connected to said walls;

wherein said walls are electrically conductive.

14. The valve of claim 1, wherein said device is a means for compressing said block of aligned carbon nanotubes.

15. The valve of claim 1, wherein said device comprises:

first and second electrodes on opposing sides of said block, said electrodes being planar and roughly parallel to the walls of the carbon nanotubes in said block;

wherein between said first and second electrodes and said block are corresponding first and second layers of insulating piezoelectric polymer.

16. A method of controlling gas flow comprising the steps of:

maintaining gas at constant pressure on the intake side of a gas valve;

restricting gas to flow through a block of aligned carbon nanotubes in said gas valve, wherein the direction of flow is parallel to the long axes of the carbon nanotubes in said block; and

controlling a compressive force applied to said block, said compressive force being applied approximately perpendicularly to the long axes of the carbon nanotubes in said block, whereby the application of said force to said block restricts the flow of said gas through said valve.

17. A method as in claim 16, wherein said compressive force is a pulsed compressive force.

18. A method as in claim 16, wherein said controlling step includes application of a force to said block by a mechanical means.

19. A method as in claim 16, wherein said controlling step includes application of a potential difference between parallel plates on opposing sides of said block and wherein said block is cuboid.

20. A method as in claim 16, wherein said gas flow is controlled into a vacuum process chamber.

21. A method as in claim 20, wherein said vacuum process chamber is an atomic layer deposition process chamber.

22. A method as in claim 16, further comprising the step of monitoring the electrical characteristics of said block for determining the compressive load on said block.

23. A method as in claim 16, further comprising the step of monitoring the electrical characteristics of said block for determining properties of said gas.

24. A method as in claim 16, wherein said controlling step includes application of a potential difference between first and second plates on opposing sides of said block, said plates being planar and roughly parallel to the walls of the carbon nanotubes in said block, and wherein between said first and second plates and said block are corresponding first and second layers of insulating piezoelectric polymer.

25. A valve for controlling flow of a gas, comprising:

a valve housing;

a block of aligned carbon nanotubes, said block and said valve housing being configured to direct said gas through the carbon nanotubes in said block; and

first and second electrodes on opposing sides of said block, said electrodes being planar and roughly parallel to the walls of the carbon nanotubes in said block;

wherein between said first and second electrodes and said block are corresponding first and second piezoelectric layers.