Temperature controlled showerhead

• US 8,137,467 B2
• Filed: 10/16/2007
• Issued: 03/20/2012
• Est. Priority Date: 10/16/2007
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Meinhold, Henner, Doble, Dan M., Lau, Stephen, Wilson, Vince, Srinivasan, Easwar
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US11/974,966
• Publication Number:
  US 20090095219A1
• Time in Patent Office: 1,617 Days
• Field of Search: 118/666, 118/663, 118/724, 118/715, 156/345.24, 156/345.27, 156/345.33, 156/345.34, 156/345.37
• US Class Current: 118/724
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles

Abstract

A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

Claims

1. A chandelier-type showerhead comprising:

(a) a stem comprising a convective cooling fluid passageway, a gas delivery passageway, a first end, and a second end opposite the first end, wherein;

the ratio of the stem'"'"'s length to the stem'"'"'s width is at least 2;

1,

the first end is configured for attachment to a chamber,

the convective cooling fluid passageway enters and exits the stem at the first end, and

the gas delivery passageway enters the stem at the first end and exits the stem at the second end;

(b) a back plate thermally coupled to the stem at the second end, wherein;

the stem protrudes from the back plate, and

the first end is offset from the back plate by a distance substantially corresponding to the length of the stem;

(c) a heater physically attached to the back plate;

(d) a face plate thermally coupled to the back plate; and

(e) a temperature sensor for measuring a temperature of the face plate, wherein the temperature sensor is electrically connected to a cable routed from the first end to the second end, and wherein the cable is routed within a sheath between the first end and the second end.

2. The chandelier-type showerhead of claim 1, wherein the temperature sensor is a thermocouple physically attached to the face plate, and further comprising a radio frequency (RF) filter electrically coupled to the thermocouple.

3. The chandelier-type showerhead of claim 1, further comprising an RF filter electrically coupled to the heater.

4. The chandelier-type showerhead of claim 2, wherein one or both of the heater and the thermocouple are isolated from radio frequency power of defined frequencies.

5. The chandelier-type showerhead of claim 1, wherein the temperature sensor is a pyrometer, fluorescence-based thermometer or infra-red thermometer.

6. The chandelier-type showerhead of claim 1, wherein an external surface of the back plate comprises a coating to increase emissivity.

7. The chandelier-type showerhead of claim 6, wherein the coating is anodized aluminum.

8. The chandelier-type showerhead of claim 1, wherein the heater is embedded in the back plate.

9. The chandelier-type showerhead of claim 1, wherein the convective cooling fluid passageway is configured to flow clean dry air (CDA), argon, helium, nitrogen, hydrogen, or a mixture of these.

10. The chandelier-type showerhead of claim 9, wherein an inlet opening to the convective cooling fluid passageway in the stem is fluidly connected to a facilities CDA at a pressure of about 50-100 psi.

11. The chandelier-type showerhead of claim 1, wherein the face plate is removably attached to the back plate.

12. The chandelier-type showerhead of claim 1, wherein the stem has a diameter of between about 1.5 to 2.5 inches.

13. The chandelier-type showerhead of claim 1, wherein the face plate and the back plate each have a thickness of about 0.25 to 0.5 inches.

14. The chandelier-type showerhead of claim 1, wherein the gap between the back plate and the face plate is about 0.5-1 inch.

15. The chandelier-type showerhead of claim 1, wherein the face plate has a diameter of about 13 inches.

16. The chandelier-type showerhead of claim 2, further comprising a standoff between the back plate and the face plate through which the thermocouple is attached to the face plate.

23. The chandelier-type showerhead of claim 1, wherein the sheath is stainless steel.

24. The chandelier-type showerhead of claim 1, wherein the sheath is electrically connected in parallel with an inductive coil and a capacitor.

25. The chandelier-type showerhead of claim 24, wherein the capacitor has a capacitance of approximately 85 picofarads and wherein the inductive coil has an inductance of approximately 1 microhenry.

26. The chandelier-type showerhead of claim 1, wherein the ratio of the largest dimension of the back plate to the stem'"'"'s width is at most about 8:

1.

27. The chandelier-type showerhead of claim 26, wherein the ratio of the largest dimension of the back plate to the stem'"'"'s width is at least about 4.5:

1.

17. A temperature control system for controlling showerhead temperatures in a CVD chamber, the system comprising:

(a) a CVD chamber comprising one or more chandelier-type temperature-controlled showerheads, each showerhead comprising;

i. a stem comprising a convective cooling fluid passageway, a gas delivery passageway, a first end, and a second end opposite the first end, wherein;

the ratio of the stem'"'"'s length to the stem'"'"'s width is at least 2;

1,

the first end is configured for attachment to the CVD chamber,

the convective cooling fluid passageway enters and exits the stem at the first end, and

the gas delivery passageway enters the stem at the first end and exits the stem at the second end,

ii. a back plate thermally coupled to the stem at the second end, wherein;

the stem protrudes from the back plate, and

the first end is offset from the back plate by a distance substantially corresponding to the length of the stem,

iii. a heater thermally coupled to the back plate,

iv. a face plate thermally coupled to the back plate, and

v. a temperature sensor for measuring the temperature of the face plate, wherein the temperature sensor is electrically connected to a cable routed from the first end to the second end, and wherein the cable is routed within a sheath between the first end and the second end;

(b) a cooling system fluidly coupled to the convective cooling fluid passageways of the one or more chandelier-type temperature-controlled showerheads comprising;

i. inlets and outlets connected with the convective cooling fluid passageways,

ii. a liquid-cooled heat exchanger configured to remove heat from a convective cooling fluid that flows serially through the convective cooling fluid passageways of the one more temperature-controlled showerheads and is cooled by the liquid-cooled heat exchanger during transit between each chandelier-type temperature-controlled showerhead; and

(c) a controller coupled to each temperature sensor and heater.

18. The system of claim 17, wherein the controller is coupled to each temperature sensor and each heater through one or more RF filters and traps.

19. The system of claim 17, wherein the convective cooling fluid is discharged from the cooling system at ambient pressure.

20. The system of claim 17, wherein the convective cooling fluid is selected from a group consisting of clean dry air (CDA), argon, helium, nitrogen, hydrogen, and a combination thereof.

21. The system of claim 20, wherein an inlet opening to the convective cooling fluid passageway in a first showerhead stem is fluidly connected to a facilities CDA at a pressure of about 50-100 psi.

22. The system of claim 17, wherein the liquid-cooled heat exchanger comprises a cast-metal block with a cooling liquid line and a plurality of convective cooling fluid lines embedded therein.