Microfluidic module including an adhesiveless self-bonding rebondable polyimide
First Claim
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1. A method of making a microfluidic module comprising:
- providing a self-bonding polyimide film having a first major surface and a second major surface;
bonding, without adhesive, the first major surface of the self-bonding polyimide film to a first mask layer;
forming a fluid flow channel in the self-bonding polyimide film,removing the first mask layer from the first major surface of the self-bonding polyimide film after forming the fluid flow channel; and
re-bonding, without adhesive, the first major surface of the self-bonding polyimide film, exposed by removal of the first mask layer, to a first cover sheet.
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Abstract
A method of making a microfluidic module is disclosed that includes forming a fluid flow channel in a self-bonding rebondable polyimide film to provide a channel sheet, the self-bonding rebondable polyimide film having a first mask layer self-bonded thereto; removing the first mask layer from the channel sheet after forming the fluid flow channel; and self-bonding the surface of the channel sheet exposed by removal of the first mask layer to a cover sheet.
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Citations
17 Claims
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1. A method of making a microfluidic module comprising:
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providing a self-bonding polyimide film having a first major surface and a second major surface; bonding, without adhesive, the first major surface of the self-bonding polyimide film to a first mask layer; forming a fluid flow channel in the self-bonding polyimide film, removing the first mask layer from the first major surface of the self-bonding polyimide film after forming the fluid flow channel; and re-bonding, without adhesive, the first major surface of the self-bonding polyimide film, exposed by removal of the first mask layer, to a first cover sheet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification