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Microfluidic module including an adhesiveless self-bonding rebondable polyimide

  • US 8,137,641 B2
  • Filed: 02/16/2011
  • Issued: 03/20/2012
  • Est. Priority Date: 09/17/2007
  • Status: Active Grant
First Claim
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1. A method of making a microfluidic module comprising:

  • providing a self-bonding polyimide film having a first major surface and a second major surface;

    bonding, without adhesive, the first major surface of the self-bonding polyimide film to a first mask layer;

    forming a fluid flow channel in the self-bonding polyimide film,removing the first mask layer from the first major surface of the self-bonding polyimide film after forming the fluid flow channel; and

    re-bonding, without adhesive, the first major surface of the self-bonding polyimide film, exposed by removal of the first mask layer, to a first cover sheet.

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