Light-emitting device and manufacturing method thereof

• US 8,138,502 B2
• Filed: 07/25/2006
• Issued: 03/20/2012
• Est. Priority Date: 08/05/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Nakamura, Osamu, Watanabe, Yasuko, Arai, Yasuyuki, Higuchi, Miyuki
• Primary Examiner(s): ARMAND, MARC ANTHONY
• Application Number:
  US11/459,768
• Publication Number:
  US 20070029554A1
• Time in Patent Office: 2,065 Days
• Field of Search: 257 79-103, 257/13, 257/918, 257/72, 257/642, 257/643, 257/759, 257/E51.001, 257/E51.052, 257/E25.008, 257/E25.009, 257/E51.018, 257/E51.022, 257/E33.077, 257/E25.032
• US Class Current: 257/72
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H01L 27/14645 Colour imagers
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/1275 Electrical connections of the two substrates
• CPC Class Codes: H10K 59/179 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/60 OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
• CPC Class Codes: H10K 71/80 using temporary substrates
• CPC Class Codes: Y10S 257/918 Light emitting regenerative switching device, e.g. light emitting scr arrays, circuitry

Abstract

To prevent a point defect and a line defect in forming a light-emitting device, thereby improving the yield. A light-emitting element and a driver circuit of the light-emitting element, which are provided over different substrates, are electrically connected. That is, a light-emitting element and a driver circuit of the light-emitting element are formed over different substrates first, and then electrically connected. By providing a light-emitting element and a driver circuit of the light-emitting element over different substrates, the step of forming the light-emitting element and the step of forming the driver circuit of the light-emitting element can be performed separately. Therefore, degrees of freedom of each step can be increased, and the process can be flexibly changed. Further, steps (irregularities) on the surface for forming the light-emitting element can be reduced than in the conventional technique.

Claims

1. A light-emitting device comprising:

a first substrate;

a light-emitting element over the first substrate;

an insulating film which covers the light-emitting element;

a second substrate; and

a pixel circuit for driving the light-emitting element over the second substrate, the second substrate being provided to face the first substrate,

wherein the light-emitting element is electrically connected to the pixel circuit through the insulating film.

2. The light-emitting device according to claim 1, wherein the second substrate is provided to face a surface of the first substrate where the light-emitting element is formed so as to cover the light-emitting element.

3. The light-emitting device according to claim 1 further comprising an image sensor over the second substrate.

4. The light-emitting device according to claim 1 further comprising an image sensor over the first substrate.

5. The light-emitting device according to claim 1 further comprising an image sensor over the first substrate,

wherein the pixel circuit comprises a plurality of thin film transistors,

wherein the image sensor comprises an amorphous semiconductor film, and

wherein each of the plurality of thin film transistors comprises a crystalline semiconductor.

6. The light-emitting device according to claim 1, wherein the first substrate and the second substrate are attached to each other with an anisotropic conductive film, thereby the light-emitting element is electrically connected to the pixel circuit.

7. The light-emitting device according to claim 1, wherein each of the first substrate and the second substrate is a light-transmissive substrate.

8. The light-emitting device according to claim 1, wherein the number of the first substrates is one, and the number of the second substrates is more than one two or more.

9. The light-emitting device according to claim 1, wherein the number of the first substrates is two or more, and the number of the second substrates is one.

10. The light-emitting device according to claim 1, wherein the number of the first substrates and the number of the second substrates are two or more.

11. The light-emitting device according to claim 1, wherein the light-emitting element is electrically connected to the pixel circuit through an opening in the insulating film.

12. A light-emitting device comprising:

a first substrate;

a light-emitting element over the first substrate;

an insulating film which covers the light-emitting element;

a second substrate; and

a pixel circuit for driving the light-emitting element over the second substrate, the second substrate being provided to face the first substrate,

wherein the pixel circuit comprises a driving transistor for driving the light-emitting element, and

wherein the driving transistor is electrically connected to the light-emitting element through the insulating film.

13. The light-emitting device according to claim 12, wherein the second substrate is provided to face a surface of the first substrate where the light-emitting element is formed so as to cover the light-emitting element.

14. The light-emitting device according to claim 12, wherein the first substrate and the second substrate are attached to each other with an anisotropic conductive film, thereby the light-emitting element is electrically connected to the driving transistor.

15. The light-emitting device according to claim 12, wherein each of the first substrate and the second substrate is a light-transmissive substrate.

16. The light-emitting device according to claim 12, wherein the number of the first substrates is one, and the number of the second substrates is two or more.

17. The light-emitting device according to claim 12, wherein the number of the first substrates is two or more, and the number of the second substrates is one.

18. The light-emitting device according to claim 12, wherein the number of the first substrates and the number of the second substrates are two or more.

19. A light-emitting device comprising:

a first substrate;

a first electrode of a light-emitting element over the first substrate;

a layer containing a light-emitting substance formed over the first substrate with the first electrode of the light-emitting element interposed between the first substrate and the layer containing the light-emitting substance;

a second substrate provided to face the first substrate;

a transistor for driving the light-emitting element over the second substrate;

an interlayer insulating film over the transistor; and

a second electrode which is electrically connected to a source region or a drain region of the transistor over the interlayer insulating film,

wherein the second electrode which is electrically connected to the source region or the drain region of the transistor is electrically connected to the first electrode.

20. The light-emitting device according to claim 19, wherein each of the first substrate and the second substrate is a light-transmissive substrate.

21. The light-emitting device according to claim 19, wherein the number of the first substrates is one, and the number of the second substrates is two or more.

22. The light-emitting device according to claim 19, wherein the number of the first substrates is two or more, and the number of the second substrates is one.

23. The light-emitting device according to claim 19, wherein the number of the first substrates and the number of the second substrates are two or more.

24. A light-emitting device comprising:

a substrate;

a light-emitting element over the substrate;

an insulating film which covers the light-emitting element; and

a film comprising a pixel circuit for driving the light-emitting element, the film being provided to face the substrate,

wherein the light-emitting element is electrically connected to the pixel circuit through the insulating film.

25. The light-emitting device according to claim 24, wherein the substrate and the film are attached to each other with an anisotropic conductive film, thereby the light-emitting element is electrically connected to the pixel circuit.

26. The light-emitting device according to claim 24, wherein each of the substrate and the film is light-transmissive.

27. The light-emitting device according to claim 24, wherein the number of the substrates is one, and the number of the films is two or more.

28. The light-emitting device according to claim 24, wherein the number of the substrates is two or more, and the number of the films is one.

29. The light-emitting device according to claim 24, wherein the number of the substrates and the number of the films are two or more.

30. The light-emitting device according to claim 24, wherein the light-emitting element is electrically connected to the pixel circuit through and opening in the insulating film.

31. A light-emitting device comprising:

a substrate;

a light-emitting element over the substrate;

an insulating film which covers the light-emitting element; and

a film comprising a pixel circuit for driving the light-emitting element, the film being provided to face the substrate,

wherein the pixel circuit for driving the light-emitting element comprises a driving transistor for driving the light-emitting element, and

wherein the light-emitting element is electrically connected to the driving transistor through the insulating film.

32. The light-emitting device according to claim 31, wherein the substrate and the film are attached to each other with an anisotropic conductive film, thereby the light-emitting element is electrically connected to the driving transistor.

33. The light-emitting device according to claim 31, wherein each of the substrate and the film is light-transmissive.

34. The light-emitting device according to claim 31, wherein the number of the substrates is one, and the number of the films is two or more.

35. The light-emitting device according to claim 31, wherein the number of the substrates is two or more, and the number of the films is one.

36. The light-emitting device according to claim 31, wherein the number of the substrates and the number of the films are two or more.

37. The light-emitting device according to claim 31, wherein the light-emitting element is electrically connected to the driving transistor though an opening in the insulating film.