On-chip integrated voltage-controlled variable inductor, methods of making and tuning such variable inductors, and design structures integrating such variable inductors
First Claim
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1. A structure comprising:
- a chip including an integrated circuit and an interconnect structure for said integrated circuit, said interconnect structure including a first metallization level, a second metallization level different from said first metallization level, a first conductive path coupled with a ground potential, and a second conductive path coupled with the ground potential;
a signal line of an inductor disposed in said first metallization level of said interconnect structure, said signal line electrically coupled with said integrated circuit for communication of an electrical signal;
a first ground line of said inductor disposed in said first metallization level of said interconnect structure or in said second metallization level of said interconnect structure, said first ground line positioned proximate to said signal line, said first ground line having a first end and a second end opposite to said first end, said first end of said first ground line coupled with said first conductive path, and said second end of said first ground line coupled with said second conductive path; and
at least one control unit included in said integrated circuit, said at least one control unit disposed in said first conductive path, said at least one control unit configured to selectively open and close said first conductive path,wherein said signal line has a first inductance value when said first conductive path is open, and said signal line has a second inductance value when said first conductive path is closed such that said first end of said first ground line is coupled by the first conductive path with the ground potential and said second end of said first ground line is coupled by the second conductive path with the ground potential.
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Abstract
On-chip integrated variable inductors, methods of making and tuning an on-chip integrated variable inductor, and design structures embodying a circuit containing the on-chip integrated variable inductor. The inductor generally includes a signal line configured to carry an electrical signal, a ground line positioned in proximity to the signal line, and at least one control unit electrically coupled with the ground line. The at least one control unit is configured to open and close switch a current path connecting the ground line with a ground potential so as to change an inductance of the signal line.
22 Citations
26 Claims
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1. A structure comprising:
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a chip including an integrated circuit and an interconnect structure for said integrated circuit, said interconnect structure including a first metallization level, a second metallization level different from said first metallization level, a first conductive path coupled with a ground potential, and a second conductive path coupled with the ground potential; a signal line of an inductor disposed in said first metallization level of said interconnect structure, said signal line electrically coupled with said integrated circuit for communication of an electrical signal; a first ground line of said inductor disposed in said first metallization level of said interconnect structure or in said second metallization level of said interconnect structure, said first ground line positioned proximate to said signal line, said first ground line having a first end and a second end opposite to said first end, said first end of said first ground line coupled with said first conductive path, and said second end of said first ground line coupled with said second conductive path; and at least one control unit included in said integrated circuit, said at least one control unit disposed in said first conductive path, said at least one control unit configured to selectively open and close said first conductive path, wherein said signal line has a first inductance value when said first conductive path is open, and said signal line has a second inductance value when said first conductive path is closed such that said first end of said first ground line is coupled by the first conductive path with the ground potential and said second end of said first ground line is coupled by the second conductive path with the ground potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of making a structure, the method comprising:
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fabricating an integrated circuit on a semiconductor substrate to form a chip; after the integrated circuit is fabricated, fabricating an interconnect structure on the chip, the interconnect structure including a first metallization level with a signal line of an inductor that is electrically coupled with the integrated circuit, a first conductive path coupled with a ground potential, and a second conductive path coupled with the ground potential; and fabricating a first ground line of the inductor in the first metallization level of the interconnect structure or in a second metallization level of the interconnect structure that is proximate to the signal line, wherein the first ground line is fabricated with a first end and a second end opposite to said first end, the first end of the first ground line is coupled with the first conductive path, the second end of the first ground line coupled with the second conductive path, the integrated circuit includes at least one control unit configured for selectively opening and closing the first conductive path said at least one control unit configured to selectively open and close said first conductive path, said signal line has a first inductance value when said first conductive path is open, and said signal line has a second inductance value when said first conductive path is closed such that said first end of said first ground line is coupled by the first conductive path with the ground potential and said second end of said first ground line is coupled by the second conductive path with the ground potential. - View Dependent Claims (19, 20)
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21. A design structure embodied in a machine readable medium for designing and manufacturing a circuit, the circuit comprising:
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a chip including an integrated circuit and an interconnect structure for said integrated circuit, said interconnect structure including a first metallization level, a second metallization level different from said first metallization level, a first conductive path coupled with a ground potential, and a second conductive path coupled with the ground potential; a signal line of an inductor disposed in said first metallization level of said interconnect structure, said signal line electrically coupled with said integrated circuit for communication of an electrical signal; a first ground line of said inductor disposed in said first metallization level of said interconnect structure or in said second metallization level of said interconnect structure, said first ground line positioned proximate to said signal line, said first ground line having a first end and a second end opposite to said first end, said first end of said first ground line coupled with said first conductive path, and said second end of said first ground line coupled with said second conductive path; and at least one control unit included in said integrated circuit, said at least one control unit disposed in said first conductive path, said at least one control unit configured to selectively open and close said first conductive path, wherein said signal line has a first inductance value when said first conductive path is open, and said signal line has a second inductance value when said first conductive path is closed such that said first end of said first ground line is coupled by the first conductive path with the ground potential and said second end of said first ground line is coupled by the second conductive path with the ground potential. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification