Method of transferring a thin film onto a support

• US 8,142,593 B2
• Filed: 08/11/2006
• Issued: 03/27/2012
• Est. Priority Date: 08/16/2005
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Deguet, Chrystel, Clavelier, Laurent, Dechamp, Jerome
• Primary Examiner(s): Mazumdar, Sonya
• Application Number:
  US12/063,808
• Publication Number:
  US 20090120568A1
• Time in Patent Office: 2,055 Days
• Field of Search: 156/153, 156/235, 156/281, 156/298, 438/455, 438/459, 257/E21.561
• US Class Current: 156/235
• CPC Class Codes: H01L 21/76254 with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
• CPC Class Codes: Y10T 156/1052 with cutting, punching, tearing or severing
• CPC Class Codes: Y10T 156/109 Embedding of laminae within face of additional laminae

Abstract

A method of transferring a thin film onto a first support, includes supplying a structure comprising a film of which at least one part originates from a solid substrate of a first material and which is solidly connected to a second support having a thermal expansion coefficient that is different from that of the first material and close to that of the first support, forming an embrittled area inside the film that defines the thin film to be transferred, affixing the film that is solidly connected to the second support to the first support, and breaking the film at the embrittled area.

Claims

1. A method for transferring a thin germanium layer onto a first silicon support, the method comprising:

providing a structure comprising a layer at least a portion of which is derived from a bulk substrate of germanium, including a preliminary step of bonding a bulk plate of germanium to a second silicon support and thinning the bulk plate to obtain the layer, wherein the layer is attached to the second silicon support, the layer being between 1 μ

m and 50 μ

m thick;

forming a buried weakened zone in the layer at a given depth, by implanting at least one gaseous species, the buried weakened zone delimiting in the structure the thin germanium layer to be transferred;

bonding the layer to the first silicon support; and

fracturing the layer in the weakened zone, wherein the fracturing is carried out with a process comprising at least one heat treatment step.

2. The method according to claim 1, wherein a thickness of the layer is dependent on the mechanical behavior as a function of temperature of the structure obtained after bonding the layer to the first silicon support.

3. The method according to claim 1, wherein fracturing the layer further comprises applying mechanical loads.

4. The method according to claim 1, wherein the coefficient of thermal expansion of the thin germanium layer differs from each of the coefficients of thermal expansion of the first and second silicon supports by at least 10%.

5. The method according to claim 1, wherein the thickness of the layer is less than 15% of the thickness of the second silicon support.

6. The method according to claim 1, wherein bonding the bulk plate is carried out at a temperature between 100°

C. and 200°

C.

7. The method according to claim 1, further comprising epitaxially depositing an epitaxial layer comprising germanium, wherein the epitaxial layer is deposited on a portion of the layer that remains attached to the second silicon support after fracturing.

8. The method according to claim 7, further comprising:

forming a buried weakened zone in the epitaxial layer;

bonding the epitaxial layer onto a third support; and

fracturing the epitaxial layer in the weakened zone.

9. The method according to claim 1, wherein the layer is obtained entirely from the bulk substrate.

10. The method according to claim 1, wherein the layer comprises an epitaxial layer of germanium.

11. The method according to claim 10, wherein the layer further comprises an epitaxial layer of a material of a thickness such that a crystalline structure of the layer is imparted by the germanium.

12. The method according to claim 10, further comprising eliminating the epitaxial layer of germanium after fracture using the epitaxial layer of the material as a stop layer.