Radiant energy imager using null switching
First Claim
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1. A sensor for measuring an influence, comprising:
- a first substantially planar electrode;
a second electrode parallel to and spaced apart from the first electrode;
a third electrode being cantilever-supported in a spaced apart relationship from the second electrode such that the second electrode is positioned between the first and third electrodes, the third electrode in electrical communication with the second electrode, the space between the second and third electrodes defining a gap; and
an electrical source connected between the first and second electrodes and configured to create an electrostatic force between the second and third electrodes, the gap between the second and third electrodes is altered by an influence and by the electrostatic force.
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Abstract
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.
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6 Claims
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1. A sensor for measuring an influence, comprising:
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a first substantially planar electrode; a second electrode parallel to and spaced apart from the first electrode; a third electrode being cantilever-supported in a spaced apart relationship from the second electrode such that the second electrode is positioned between the first and third electrodes, the third electrode in electrical communication with the second electrode, the space between the second and third electrodes defining a gap; and an electrical source connected between the first and second electrodes and configured to create an electrostatic force between the second and third electrodes, the gap between the second and third electrodes is altered by an influence and by the electrostatic force. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification